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- W2571302887 abstract "This section concentrates on the leading ferroelectric material used in thin-film piezoelectric MEMS: lead zirconate titanate (PbZr x Ti1−x O3) or PZT. PZT-based MEMS technology has been explored extensively for a variety of actuator applications [1] but has received less attention for RF MEMS resonator and filter applications. Despite the long and successful history of bulk PZT resonators [2], the process complexity/compatibility issues and high mechanical losses have discouraged the exploitation of this strong piezoelectric for these applications. However, for select MEMS resonator and filter applications, thin-film PZT offers many unique advantages due to the high electromechanical coupling factors, permittivity, piezoelectric stress constants, and the DC-bias electric field dependence of these properties. Significant progress has also been made in developing materials deposition and processing technologies that address the fabrication challenges with PZT thin films. The goals of this section include an analysis of the deposition of these materials, patterning techniques, identification of device design and processing concerns, and finally a detailed subsection covering examples of how PZT thin films have been incorporated into resonant-based devices." @default.
- W2571302887 created "2017-01-13" @default.
- W2571302887 creator A5021125445 @default.
- W2571302887 creator A5077175798 @default.
- W2571302887 date "2017-01-01" @default.
- W2571302887 modified "2023-10-03" @default.
- W2571302887 title "Lead Zirconate Titanate (PZT) for M/NEMS" @default.
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- W2571302887 doi "https://doi.org/10.1007/978-3-319-28688-4_2" @default.
- W2571302887 hasPublicationYear "2017" @default.
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