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- W2573086479 abstract "We investigated the effect of short beam length and gap distance between short beams on the resonance frequencies in Fishbone-shaped MEMS resonator. To do so, we fabricated three different kinds of Fishbone-shaped MEMS resonators, and measured their resonance frequencies. Moreover, we investigated the resonance frequencies by the simulation, which were compared with measurement results and they were well agreed. As a result, we could confirm that the longer short beam length or the wider gap distance between short beams gives the lower resonance frequency. Thus, by the variation of short beam lengths or gap distances between short beams, we could achieve finer tuning of the resonance frequencies in Fishbone-shaped resonator." @default.
- W2573086479 created "2017-01-26" @default.
- W2573086479 creator A5029720786 @default.
- W2573086479 creator A5048919199 @default.
- W2573086479 creator A5062386124 @default.
- W2573086479 creator A5083467150 @default.
- W2573086479 date "2016-10-01" @default.
- W2573086479 modified "2023-10-12" @default.
- W2573086479 title "The effect of short beam length and gap distance on the resonance frequencies in Fishbone-shaped microelectromechanical system resonator" @default.
- W2573086479 cites W2040200151 @default.
- W2573086479 cites W2063105063 @default.
- W2573086479 doi "https://doi.org/10.1109/icsens.2016.7808931" @default.
- W2573086479 hasPublicationYear "2016" @default.
- W2573086479 type Work @default.
- W2573086479 sameAs 2573086479 @default.
- W2573086479 citedByCount "0" @default.
- W2573086479 crossrefType "proceedings-article" @default.
- W2573086479 hasAuthorship W2573086479A5029720786 @default.
- W2573086479 hasAuthorship W2573086479A5048919199 @default.
- W2573086479 hasAuthorship W2573086479A5062386124 @default.
- W2573086479 hasAuthorship W2573086479A5083467150 @default.
- W2573086479 hasConcept C120665830 @default.
- W2573086479 hasConcept C121332964 @default.
- W2573086479 hasConcept C139210041 @default.
- W2573086479 hasConcept C159985019 @default.
- W2573086479 hasConcept C168834538 @default.
- W2573086479 hasConcept C184779094 @default.
- W2573086479 hasConcept C192562407 @default.
- W2573086479 hasConcept C37977207 @default.
- W2573086479 hasConcept C49040817 @default.
- W2573086479 hasConcept C50587689 @default.
- W2573086479 hasConcept C97126364 @default.
- W2573086479 hasConceptScore W2573086479C120665830 @default.
- W2573086479 hasConceptScore W2573086479C121332964 @default.
- W2573086479 hasConceptScore W2573086479C139210041 @default.
- W2573086479 hasConceptScore W2573086479C159985019 @default.
- W2573086479 hasConceptScore W2573086479C168834538 @default.
- W2573086479 hasConceptScore W2573086479C184779094 @default.
- W2573086479 hasConceptScore W2573086479C192562407 @default.
- W2573086479 hasConceptScore W2573086479C37977207 @default.
- W2573086479 hasConceptScore W2573086479C49040817 @default.
- W2573086479 hasConceptScore W2573086479C50587689 @default.
- W2573086479 hasConceptScore W2573086479C97126364 @default.
- W2573086479 hasLocation W25730864791 @default.
- W2573086479 hasOpenAccess W2573086479 @default.
- W2573086479 hasPrimaryLocation W25730864791 @default.
- W2573086479 hasRelatedWork W1992071730 @default.
- W2573086479 hasRelatedWork W2034833526 @default.
- W2573086479 hasRelatedWork W2055953685 @default.
- W2573086479 hasRelatedWork W2062654062 @default.
- W2573086479 hasRelatedWork W2314107714 @default.
- W2573086479 hasRelatedWork W2319821499 @default.
- W2573086479 hasRelatedWork W2409119100 @default.
- W2573086479 hasRelatedWork W2525158003 @default.
- W2573086479 hasRelatedWork W2549962040 @default.
- W2573086479 hasRelatedWork W2594623742 @default.
- W2573086479 hasRelatedWork W2768208181 @default.
- W2573086479 hasRelatedWork W2781781908 @default.
- W2573086479 hasRelatedWork W2893004753 @default.
- W2573086479 hasRelatedWork W2966388500 @default.
- W2573086479 hasRelatedWork W2995225785 @default.
- W2573086479 hasRelatedWork W3017424188 @default.
- W2573086479 hasRelatedWork W3098545604 @default.
- W2573086479 hasRelatedWork W2215530592 @default.
- W2573086479 hasRelatedWork W2860972512 @default.
- W2573086479 hasRelatedWork W2869653546 @default.
- W2573086479 isParatext "false" @default.
- W2573086479 isRetracted "false" @default.
- W2573086479 magId "2573086479" @default.
- W2573086479 workType "article" @default.