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- W2576645234 abstract "We present a fabricating method for all-solid-state LiNi0.5Mn1.5O4/LiPON/SiNx structure flexible lithium micro-batteries using excimer laser annealing system. Excimer laser annealing can selectively crystallize LiNi0.5Mn1.5O4 cathode thin film in low temperature without thermal damage of substrate. Structural properties of the thin films were investigated by X-ray diffraction (XRD), transmission electron microscope (TEM), and scanning electron microscopy (SEM). The initial capacity of flexible battery on polyimide substrate was 20 μAh μm−1 cm−2 at 0.2 C-rate with operating voltage of 4.6 V. Therefore, we expect that these batteries make it possible to be applied as a power source for various types of micro-sensors." @default.
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- W2576645234 date "2016-10-01" @default.
- W2576645234 modified "2023-09-25" @default.
- W2576645234 title "Manufacturing of LiNi<inf>0.5</inf>Mn<inf>1.5</inf>O<inf>4</inf>/LiPON/SiN<inf>x</inf> structured flexible lithium microbatteries" @default.
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- W2576645234 doi "https://doi.org/10.1109/icsens.2016.7808551" @default.
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