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• W2577914922 abstract "This paper deals with missing data in semiconductor manufacturing derived from a measurement sampling strategies. The idea is to construct a virtual metrology module to estimate non measured variables using a new modified Just-In-Time Learning approach (JITL). The aim of this paper is to integrate estimated data into product control loop." @default.
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• W2577914922 date "2017-01-01" @default.
• W2577914922 modified "2023-09-25" @default.
• W2577914922 title "Virtual Metrology applied in Run-to-Run Control for a Chemical Mechanical Planarization process" @default.
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• W2577914922 doi "https://doi.org/10.1088/1742-6596/783/1/012042" @default.
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