Matches in SemOpenAlex for { <https://semopenalex.org/work/W2578335852> ?p ?o ?g. }
- W2578335852 endingPage "115202" @default.
- W2578335852 startingPage "115202" @default.
- W2578335852 abstract "Investigation of electronegative plasmas has now been atrractive due to the advantages of negative-ion assisted etching and charge-free ion implantation in semiconductor manufacture. Langmuir electrostatic probe, as a simple, inexpensive and good spatial resolution diagnosic tool, is popularly used in investigating electronegative plasmas. In this paper, the Langmuir electrostatic probe is proposed to measure the capacitively coupled Ar plasmas with added electronegative gases, such as O2, Cl2 and SF6. The experimental results from the measurements of Ar plasmas with added electronegative gases driven by a 40.68 MHz field indicate that, with increasing flow rate of electronegative gas, high energy peak will occur in electron energy possibility function and shift towards higher energyside. The addition of electronegative gases reduces the electron density significantly as the electron temperature increases. We also calculate the electronegativity of Ar plasmas for the three kinds of electronegative gases. The preliminary interpretations of the above experimental phenomena are presented." @default.
- W2578335852 created "2017-01-26" @default.
- W2578335852 creator A5010339041 @default.
- W2578335852 creator A5020235122 @default.
- W2578335852 creator A5032855719 @default.
- W2578335852 creator A5058940103 @default.
- W2578335852 creator A5059934410 @default.
- W2578335852 creator A5066970639 @default.
- W2578335852 creator A5067799795 @default.
- W2578335852 creator A5074410944 @default.
- W2578335852 date "2013-01-01" @default.
- W2578335852 modified "2023-09-27" @default.
- W2578335852 title "Influence of addifion of electronegative gases on the properties of capacitively coupled Ar plasmas" @default.
- W2578335852 cites W1967865682 @default.
- W2578335852 cites W1970161244 @default.
- W2578335852 cites W1974708423 @default.
- W2578335852 cites W1976870272 @default.
- W2578335852 cites W1977185663 @default.
- W2578335852 cites W1977426138 @default.
- W2578335852 cites W1982227791 @default.
- W2578335852 cites W2009539955 @default.
- W2578335852 cites W2014517802 @default.
- W2578335852 cites W2016134900 @default.
- W2578335852 cites W2017756651 @default.
- W2578335852 cites W2035637653 @default.
- W2578335852 cites W2041367560 @default.
- W2578335852 cites W2042799756 @default.
- W2578335852 cites W2046642264 @default.
- W2578335852 cites W2057593091 @default.
- W2578335852 cites W2060212399 @default.
- W2578335852 cites W2071411118 @default.
- W2578335852 cites W2077202758 @default.
- W2578335852 cites W2079866923 @default.
- W2578335852 cites W2082577820 @default.
- W2578335852 cites W2083200495 @default.
- W2578335852 cites W2086149580 @default.
- W2578335852 cites W2148330149 @default.
- W2578335852 cites W2149537984 @default.
- W2578335852 cites W2165953551 @default.
- W2578335852 cites W3021175624 @default.
- W2578335852 cites W562960757 @default.
- W2578335852 doi "https://doi.org/10.7498/aps.62.115202" @default.
- W2578335852 hasPublicationYear "2013" @default.
- W2578335852 type Work @default.
- W2578335852 sameAs 2578335852 @default.
- W2578335852 citedByCount "4" @default.
- W2578335852 countsByYear W25783358522017 @default.
- W2578335852 countsByYear W25783358522022 @default.
- W2578335852 crossrefType "journal-article" @default.
- W2578335852 hasAuthorship W2578335852A5010339041 @default.
- W2578335852 hasAuthorship W2578335852A5020235122 @default.
- W2578335852 hasAuthorship W2578335852A5032855719 @default.
- W2578335852 hasAuthorship W2578335852A5058940103 @default.
- W2578335852 hasAuthorship W2578335852A5059934410 @default.
- W2578335852 hasAuthorship W2578335852A5066970639 @default.
- W2578335852 hasAuthorship W2578335852A5067799795 @default.
- W2578335852 hasAuthorship W2578335852A5074410944 @default.
- W2578335852 hasBestOaLocation W25783358521 @default.
- W2578335852 hasConcept C121332964 @default.
- W2578335852 hasConcept C145148216 @default.
- W2578335852 hasConcept C147120987 @default.
- W2578335852 hasConcept C176118016 @default.
- W2578335852 hasConcept C177293861 @default.
- W2578335852 hasConcept C178790620 @default.
- W2578335852 hasConcept C184779094 @default.
- W2578335852 hasConcept C185592680 @default.
- W2578335852 hasConcept C192562407 @default.
- W2578335852 hasConcept C22175881 @default.
- W2578335852 hasConcept C43503373 @default.
- W2578335852 hasConcept C62520636 @default.
- W2578335852 hasConcept C82706917 @default.
- W2578335852 hasConceptScore W2578335852C121332964 @default.
- W2578335852 hasConceptScore W2578335852C145148216 @default.
- W2578335852 hasConceptScore W2578335852C147120987 @default.
- W2578335852 hasConceptScore W2578335852C176118016 @default.
- W2578335852 hasConceptScore W2578335852C177293861 @default.
- W2578335852 hasConceptScore W2578335852C178790620 @default.
- W2578335852 hasConceptScore W2578335852C184779094 @default.
- W2578335852 hasConceptScore W2578335852C185592680 @default.
- W2578335852 hasConceptScore W2578335852C192562407 @default.
- W2578335852 hasConceptScore W2578335852C22175881 @default.
- W2578335852 hasConceptScore W2578335852C43503373 @default.
- W2578335852 hasConceptScore W2578335852C62520636 @default.
- W2578335852 hasConceptScore W2578335852C82706917 @default.
- W2578335852 hasIssue "11" @default.
- W2578335852 hasLocation W25783358521 @default.
- W2578335852 hasOpenAccess W2578335852 @default.
- W2578335852 hasPrimaryLocation W25783358521 @default.
- W2578335852 hasRelatedWork W2021415606 @default.
- W2578335852 hasRelatedWork W2056990649 @default.
- W2578335852 hasRelatedWork W2074280496 @default.
- W2578335852 hasRelatedWork W2078148991 @default.
- W2578335852 hasRelatedWork W2114284783 @default.
- W2578335852 hasRelatedWork W2131775445 @default.
- W2578335852 hasRelatedWork W2521367323 @default.
- W2578335852 hasRelatedWork W4214684587 @default.
- W2578335852 hasRelatedWork W4362663149 @default.
- W2578335852 hasRelatedWork W4367186977 @default.