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- W2580745310 abstract "High power impulse magnetron sputtering (HiPIMS) technique was used to deposit AlSiN coatings on silicon Si (100) substrates using metallurgical Al0.8Si0.2 alloy target and under varying nitrogen-argon flow ratios from 5% to 50%. The current-voltage characteristics of the Al0.8Si0.2 alloy target was first investigated, and then the microstructure evolution and mechanical properties of AlSiN coatings grown with increasing nitrogen-argon flow ratios were analyzed by an x-ray photoelectron spectroscopy, grazing incident X-ray diffractometry, scanning electron microscope, transmission electron microscopy, and a nanoindenter. We found that the target was fully poisoned when the nitrogen-argon flow ratio was higher than 50%. The nitrogen-argon flow ratio plays a crucial role in the phase evolution. The phase changed from a metal-rich AlSi crystalline structure (nitrogen-argon flow ratio < 10%) to a nanocomposites structure consisting of nanocrystalline c-AlN surrounded in the amorphous Si3N4 phase, which becomes more amorphous phase and smaller nanocrystalline as nitrogen-argon flow ratio increases. As a result, the hardness of AlSiN coating increased with increasing nitrogen-argon flow ratio, and reached a maximum value of 20.6 GPa in this study." @default.
- W2580745310 created "2017-02-03" @default.
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- W2580745310 date "2017-06-01" @default.
- W2580745310 modified "2023-10-10" @default.
- W2580745310 title "Effect of nitrogen-argon flow ratio on the microstructural and mechanical properties of AlSiN thin films prepared by high power impulse magnetron sputtering" @default.
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- W2580745310 doi "https://doi.org/10.1016/j.surfcoat.2017.01.085" @default.
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