Matches in SemOpenAlex for { <https://semopenalex.org/work/W2581360948> ?p ?o ?g. }
Showing items 1 to 60 of
60
with 100 items per page.
- W2581360948 abstract "Abstract Here we investigate a new energy dispersive X-ray detector, which for the first time is optimized to work at the conditions typically used for high resolution imaging in a scanning electron microscope (SEM). To achieve this, significant developments have been made with regard to detector geometry and electronics. Using this new detector we are able to analyze structures in bulk semiconductor devices as well as thin sections at sub 20nm length scales in SEM. Here we outline the conditions required to carry out this analysis. Based on these results we propose workflows to accelerate failure analysis by obtaining the analysis result directly in the SEM without the need for analysis using transmission electron microscopy (TEM)." @default.
- W2581360948 created "2017-02-03" @default.
- W2581360948 creator A5007858969 @default.
- W2581360948 creator A5034644558 @default.
- W2581360948 creator A5035442587 @default.
- W2581360948 creator A5056617559 @default.
- W2581360948 creator A5072028548 @default.
- W2581360948 date "2016-11-01" @default.
- W2581360948 modified "2023-09-23" @default.
- W2581360948 title "Elemental Characterization of Sub 20 nm Structures in Devices Using Low Energy SEM-EDS" @default.
- W2581360948 doi "https://doi.org/10.31399/asm.cp.istfa2016p0480" @default.
- W2581360948 hasPublicationYear "2016" @default.
- W2581360948 type Work @default.
- W2581360948 sameAs 2581360948 @default.
- W2581360948 citedByCount "0" @default.
- W2581360948 crossrefType "proceedings-article" @default.
- W2581360948 hasAuthorship W2581360948A5007858969 @default.
- W2581360948 hasAuthorship W2581360948A5034644558 @default.
- W2581360948 hasAuthorship W2581360948A5035442587 @default.
- W2581360948 hasAuthorship W2581360948A5056617559 @default.
- W2581360948 hasAuthorship W2581360948A5072028548 @default.
- W2581360948 hasConcept C171250308 @default.
- W2581360948 hasConcept C179104552 @default.
- W2581360948 hasConcept C185592680 @default.
- W2581360948 hasConcept C192562407 @default.
- W2581360948 hasConcept C2780841128 @default.
- W2581360948 hasConcept C64885871 @default.
- W2581360948 hasConceptScore W2581360948C171250308 @default.
- W2581360948 hasConceptScore W2581360948C179104552 @default.
- W2581360948 hasConceptScore W2581360948C185592680 @default.
- W2581360948 hasConceptScore W2581360948C192562407 @default.
- W2581360948 hasConceptScore W2581360948C2780841128 @default.
- W2581360948 hasConceptScore W2581360948C64885871 @default.
- W2581360948 hasLocation W25813609481 @default.
- W2581360948 hasOpenAccess W2581360948 @default.
- W2581360948 hasPrimaryLocation W25813609481 @default.
- W2581360948 hasRelatedWork W1986142463 @default.
- W2581360948 hasRelatedWork W2014943119 @default.
- W2581360948 hasRelatedWork W2033015430 @default.
- W2581360948 hasRelatedWork W2035893886 @default.
- W2581360948 hasRelatedWork W2037706447 @default.
- W2581360948 hasRelatedWork W2085512239 @default.
- W2581360948 hasRelatedWork W2186256936 @default.
- W2581360948 hasRelatedWork W2286717232 @default.
- W2581360948 hasRelatedWork W2342683845 @default.
- W2581360948 hasRelatedWork W2423030018 @default.
- W2581360948 hasRelatedWork W2560982227 @default.
- W2581360948 hasRelatedWork W2930791355 @default.
- W2581360948 hasRelatedWork W2942499599 @default.
- W2581360948 hasRelatedWork W3036786981 @default.
- W2581360948 hasRelatedWork W3080172430 @default.
- W2581360948 hasRelatedWork W3132008392 @default.
- W2581360948 hasRelatedWork W3135797391 @default.
- W2581360948 hasRelatedWork W3192822506 @default.
- W2581360948 hasRelatedWork W3195340441 @default.
- W2581360948 hasRelatedWork W54094581 @default.
- W2581360948 isParatext "false" @default.
- W2581360948 isRetracted "false" @default.
- W2581360948 magId "2581360948" @default.
- W2581360948 workType "article" @default.