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- W2582772044 startingPage "185" @default.
- W2582772044 abstract "Aluminum micro-coil has been fabricated by utilizing electromigration. In a passivated Al line with a slit at the anode end, atoms accumulated before the slit due to high current density and high substrate temperature are released from the pre-introduced holes in the passivation layer, and form a micro-fiber owing to crystallization. When the Al atoms are non-uniformly added to the Al/TiN interface, the fiber is rotated during their growth, and the micro-coil is fabricated." @default.
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- W2582772044 date "2008-01-01" @default.
- W2582772044 modified "2023-09-23" @default.
- W2582772044 title "443 Utilization of Electromigration in Fabricating Al Micro-coil" @default.
- W2582772044 doi "https://doi.org/10.1299/jsmemecjo.2008.8.0_185" @default.
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