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• W2583085233 abstract "The oxidation mechanism of 4H-SiC in diluted N2O ambient was studied at various temperatures, N2O flow rates, and N2/N2O flow ratios. The collision partner, N2 in this study, plays crucial roles in determining the oxidation rate and N-incorporation. According to the proposed oxidation mechanism, lowering the interface state density at lower oxidation temperatures is possible with a high-efficiency collision partner." @default.
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• W2583085233 date "2017-01-26" @default.
• W2583085233 modified "2023-09-27" @default.
• W2583085233 title "A comprehensive study on the oxidation of 4H-SiC in diluted N2O ambient" @default.
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• W2583085233 doi "https://doi.org/10.7567/jjap.56.04cr02" @default.
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