FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2586025180> ?p ?o ?g. }

• W2586025180 endingPage "085101" @default.
• W2586025180 startingPage "085101" @default.
• W2586025180 abstract "Ultra-smooth and arbitrarily shaped reflective optics are necessary for further progress in EUV/XUV lithography, x-ray and synchrotron technology. As one of the most important technological mirror optic materials, aluminium behaves in a rather difficult way in ultra-precision machining with such standard techniques as diamond-turning and subsequent ion beam figuring (IBF). In particular, in the latter, a strong surface roughening is obtained. Hence, up to now it has not been possible to attain the surface qualities required for UV or just visible spectral range applications. To overcome the limitations mainly caused by the aluminium alloy structural and compositional conditions, a reactive ion beam machining process using oxygen process gas is evaluated. To clarify the principle differences in the effect of oxygen gas contrary to oxygen ions on aluminium surface machining, we firstly focus on chemical-assisted ion beam etching (CAIBE) and reactive ion beam etching (RIBE) experiments in a phenomenological manner. Then, the optimum process route will be explored within a more quantitative analysis applying the concept of power spectral density (PSD) for a sophisticated treatment of the surface topography. Eventually, the surface composition is examined by means of dynamic secondary ion mass spectrometry (SIMS) suggesting a characteristic model scheme for the chemical modification of the aluminium surface during oxygen ion beam machining. Monte Carlo simulations were applied to achieve a more detailed process conception." @default.
• W2586025180 created "2017-02-10" @default.
• W2586025180 creator A5010144656 @default.
• W2586025180 creator A5025453533 @default.
• W2586025180 creator A5059164151 @default.
• W2586025180 date "2017-01-30" @default.
• W2586025180 modified "2023-10-18" @default.
• W2586025180 title "Reactive ion beam figuring of optical aluminium surfaces" @default.
• W2586025180 cites W1787514461 @default.
• W2586025180 cites W1966809587 @default.
• W2586025180 cites W1968525924 @default.
• W2586025180 cites W1969852806 @default.
• W2586025180 cites W1978818562 @default.
• W2586025180 cites W1981314987 @default.
• W2586025180 cites W1983304266 @default.
• W2586025180 cites W1988178297 @default.
• W2586025180 cites W1999427805 @default.
• W2586025180 cites W2008403052 @default.
• W2586025180 cites W2009518030 @default.
• W2586025180 cites W2014496548 @default.
• W2586025180 cites W2017809842 @default.
• W2586025180 cites W2023033348 @default.
• W2586025180 cites W2028665860 @default.
• W2586025180 cites W2030759275 @default.
• W2586025180 cites W2034433960 @default.
• W2586025180 cites W2037612744 @default.
• W2586025180 cites W2040189343 @default.
• W2586025180 cites W2043332365 @default.
• W2586025180 cites W2043781775 @default.
• W2586025180 cites W2046784646 @default.
• W2586025180 cites W2047491557 @default.
• W2586025180 cites W2048792259 @default.
• W2586025180 cites W2049707321 @default.
• W2586025180 cites W2055713032 @default.
• W2586025180 cites W2064311999 @default.
• W2586025180 cites W2074409595 @default.
• W2586025180 cites W2075578362 @default.
• W2586025180 cites W2076075317 @default.
• W2586025180 cites W2077354823 @default.
• W2586025180 cites W2079673891 @default.
• W2586025180 cites W2082146253 @default.
• W2586025180 cites W2084288965 @default.
• W2586025180 cites W2086164502 @default.
• W2586025180 cites W2089816985 @default.
• W2586025180 cites W2113165521 @default.
• W2586025180 cites W2135146051 @default.
• W2586025180 cites W2138682967 @default.
• W2586025180 cites W2147353845 @default.
• W2586025180 cites W2154833099 @default.
• W2586025180 cites W2411352663 @default.
• W2586025180 doi "https://doi.org/10.1088/1361-6463/50/8/085101" @default.
• W2586025180 hasPublicationYear "2017" @default.
• W2586025180 type Work @default.
• W2586025180 sameAs 2586025180 @default.
• W2586025180 citedByCount "19" @default.
• W2586025180 countsByYear W25860251802018 @default.
• W2586025180 countsByYear W25860251802019 @default.
• W2586025180 countsByYear W25860251802020 @default.
• W2586025180 countsByYear W25860251802021 @default.
• W2586025180 countsByYear W25860251802022 @default.
• W2586025180 countsByYear W25860251802023 @default.
• W2586025180 crossrefType "journal-article" @default.
• W2586025180 hasAuthorship W2586025180A5010144656 @default.
• W2586025180 hasAuthorship W2586025180A5025453533 @default.
• W2586025180 hasAuthorship W2586025180A5059164151 @default.
• W2586025180 hasBestOaLocation W25860251801 @default.
• W2586025180 hasConcept C100460472 @default.
• W2586025180 hasConcept C120665830 @default.
• W2586025180 hasConcept C121332964 @default.
• W2586025180 hasConcept C139378739 @default.
• W2586025180 hasConcept C162996421 @default.
• W2586025180 hasConcept C168834538 @default.
• W2586025180 hasConcept C171250308 @default.
• W2586025180 hasConcept C185592680 @default.
• W2586025180 hasConcept C191897082 @default.
• W2586025180 hasConcept C192562407 @default.
• W2586025180 hasConcept C2524010 @default.
• W2586025180 hasConcept C2775988915 @default.
• W2586025180 hasConcept C2776799497 @default.
• W2586025180 hasConcept C2779227376 @default.
• W2586025180 hasConcept C33923547 @default.
• W2586025180 hasConcept C49040817 @default.
• W2586025180 hasConcept C50774322 @default.
• W2586025180 hasConcept C513153333 @default.
• W2586025180 hasConcept C523214423 @default.
• W2586025180 hasConceptScore W2586025180C100460472 @default.
• W2586025180 hasConceptScore W2586025180C120665830 @default.
• W2586025180 hasConceptScore W2586025180C121332964 @default.
• W2586025180 hasConceptScore W2586025180C139378739 @default.
• W2586025180 hasConceptScore W2586025180C162996421 @default.
• W2586025180 hasConceptScore W2586025180C168834538 @default.
• W2586025180 hasConceptScore W2586025180C171250308 @default.
• W2586025180 hasConceptScore W2586025180C185592680 @default.
• W2586025180 hasConceptScore W2586025180C191897082 @default.
• W2586025180 hasConceptScore W2586025180C192562407 @default.
• W2586025180 hasConceptScore W2586025180C2524010 @default.
• W2586025180 hasConceptScore W2586025180C2775988915 @default.
• W2586025180 hasConceptScore W2586025180C2776799497 @default.

• next