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• W2587240167 abstract "Silicon wafers are getting bigger and bigger in production line, aiming for faster manufacturing, lower cost and higher yield. The handling/transportation technique is becoming more and more critical during production. As wafer is being handled with physical contact there is always risk of damage and contemination coming from contact surface. Contactless wafer stage utilizes a thin film of pressurized air to support wafer, provides wafer handling without physical contact, hence reducing risk of damage and contamination. A special contactless 3DoF wafer stage called the Flowerbed is developed by H.P.Vuong during his PhD research. This flowerbed has a creative mechanical design to combine wafer support and driving function, so that wafer can be supported and driven by pressurized air with 3 degrees of freedom (x-y-theta). The goal of this MSc research is to design an actuation system for Flowerbed, and design a special pneumatic actuator specific for this application. Two actuation configurations are discussed and concept of 3-RPR parallel manipulator is chosen. Pneumatic actuator is chosen to be type of actuator in this research. This pneumatic actuator has to be specially made, because requirement of actuators is, that it should have a stroke of 80 micro meters, with a maximum force of higher than 140N, and required bandwidth is 150Hz. Such pneumatic actuator is rarely seen and is not available. A model is developed for this special pneumatic actuator, and is validated by test setups. Further development is made by a design with piezo buzzer. This piezo buzzer is implemented as a low cost valve with high performance, and use of piezo buzzer makes it possible to integrate valve into actuator housing, hence further reduce cost and improve performance. A prototype is made to demonstrate feasibility of such kind of pneumatic actuator. This prototype meets requirement of actuator and has very good performance for small range of stroke. However due to weakness of pneumatic actuator, performance of large stroke must be improved. The knowledge developed in this research is summarised as a design method, and a GUI toolbox is made using MATLAB. This toolbox can be used to assist design of such actuator, reducing difficulty and provides assist for further research." @default.
• W2587240167 created "2017-02-17" @default.
• W2587240167 creator A5027970821 @default.
• W2587240167 date "2016-01-01" @default.
• W2587240167 modified "2023-09-27" @default.
• W2587240167 title "Actuation System Design for a 3 DoF Contactless Wafer Stage" @default.
• W2587240167 hasPublicationYear "2016" @default.
• W2587240167 type Work @default.
• W2587240167 sameAs 2587240167 @default.
• W2587240167 citedByCount "0" @default.
• W2587240167 crossrefType "journal-article" @default.
• W2587240167 hasAuthorship W2587240167A5027970821 @default.
• W2587240167 hasConcept C109217959 @default.
• W2587240167 hasConcept C119599485 @default.
• W2587240167 hasConcept C127413603 @default.
• W2587240167 hasConcept C133731056 @default.
• W2587240167 hasConcept C160671074 @default.
• W2587240167 hasConcept C170401851 @default.
• W2587240167 hasConcept C171146098 @default.
• W2587240167 hasConcept C172707124 @default.
• W2587240167 hasConcept C203311528 @default.
• W2587240167 hasConcept C2777642091 @default.
• W2587240167 hasConcept C2779119184 @default.
• W2587240167 hasConcept C78519656 @default.
• W2587240167 hasConceptScore W2587240167C109217959 @default.
• W2587240167 hasConceptScore W2587240167C119599485 @default.
• W2587240167 hasConceptScore W2587240167C127413603 @default.
• W2587240167 hasConceptScore W2587240167C133731056 @default.
• W2587240167 hasConceptScore W2587240167C160671074 @default.
• W2587240167 hasConceptScore W2587240167C170401851 @default.
• W2587240167 hasConceptScore W2587240167C171146098 @default.
• W2587240167 hasConceptScore W2587240167C172707124 @default.
• W2587240167 hasConceptScore W2587240167C203311528 @default.
• W2587240167 hasConceptScore W2587240167C2777642091 @default.
• W2587240167 hasConceptScore W2587240167C2779119184 @default.
• W2587240167 hasConceptScore W2587240167C78519656 @default.
• W2587240167 hasLocation W25872401671 @default.
• W2587240167 hasOpenAccess W2587240167 @default.
• W2587240167 hasPrimaryLocation W25872401671 @default.
• W2587240167 hasRelatedWork W140234075 @default.
• W2587240167 hasRelatedWork W1567923029 @default.
• W2587240167 hasRelatedWork W1587420641 @default.
• W2587240167 hasRelatedWork W1848534568 @default.
• W2587240167 hasRelatedWork W1975864253 @default.
• W2587240167 hasRelatedWork W2002198023 @default.
• W2587240167 hasRelatedWork W2008901700 @default.
• W2587240167 hasRelatedWork W2012578428 @default.
• W2587240167 hasRelatedWork W2121604789 @default.
• W2587240167 hasRelatedWork W2186273118 @default.
• W2587240167 hasRelatedWork W2312594716 @default.
• W2587240167 hasRelatedWork W2351859238 @default.
• W2587240167 hasRelatedWork W2588760867 @default.
• W2587240167 hasRelatedWork W2775642123 @default.
• W2587240167 hasRelatedWork W2905495325 @default.
• W2587240167 hasRelatedWork W2996313506 @default.
• W2587240167 hasRelatedWork W3006852268 @default.
• W2587240167 hasRelatedWork W3112477705 @default.
• W2587240167 hasRelatedWork W1960628905 @default.
• W2587240167 hasRelatedWork W2553758016 @default.
• W2587240167 isParatext "false" @default.
• W2587240167 isRetracted "false" @default.
• W2587240167 magId "2587240167" @default.
• W2587240167 workType "article" @default.