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- W2589773925 abstract "Vanadium oxide (VxOy) multilayer sandwich structures previously studied by our group were found to yield a sensitive thermometer thin film material suitable for microbolometer applications. In this work, we aim to estimate the performance of a proposed air-bridge microbolometer configuration based on VxOy multilayer sandwich structure thermometer thin films. For this purpose, a microbolometer was fabricated on silicon (Si) substrate covered with a silicon nitride (Si3N4) insulating layer using VxOy thermometer thin film material. The fabricated microbolometer was patterned using electron-beam lithography and liftoff techniques and it was characterized in terms of its voltage repsonsivity (Rv), signal to noise ratio (SNR), noise equivalent power (NEP) and detectivity D*. A model was then developed by the aid of numerical optical/thermal simulations and experimentally measured parameters to estimate the performance of the microbolometer when fabricated in an air-bridge configuration. The estimated D* was found to be 1.55×107 cm.√Hz/ W." @default.
- W2589773925 created "2017-03-03" @default.
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- W2589773925 date "2017-01-01" @default.
- W2589773925 modified "2023-10-18" @default.
- W2589773925 title "Fabrication and design of vanadium oxide microbolometer" @default.
- W2589773925 cites W1964334669 @default.
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- W2589773925 doi "https://doi.org/10.1063/1.4975416" @default.
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