Matches in SemOpenAlex for { <https://semopenalex.org/work/W2590842758> ?p ?o ?g. }
- W2590842758 endingPage "125301" @default.
- W2590842758 startingPage "125301" @default.
- W2590842758 abstract "Electron-beam induced deposition of high-purity copper nanostructures is desirable for nanoscale rapid prototyping, interconnection of chemically synthesized structures, and integrated circuit editing. However, metalorganic, gas-phase precursors for copper introduce high levels of carbon contamination. Here we demonstrate electron beam induced deposition of high-purity copper nanostructures from aqueous solutions of copper sulfate. The addition of sulfuric acid eliminates oxygen contamination from the deposit and produces a deposit with ∼95 at% copper. The addition of sodium dodecyl sulfate (SDS), Triton X-100, or polyethylene glycole (PEG) improves pattern resolution and controls deposit morphology but leads to slightly reduced purity. High resolution nested lines with a 100 nm pitch are obtained from CuSO4–H2SO4–SDS–H2O. Higher aspect ratios (∼1:1) with reduced line edge roughness and unintended deposition are obtained from CuSO4–H2SO4–PEG–H2O. Evidence for radiation-chemical deposition mechanisms was observed, including deposition efficiency as high as 1.4 primary electrons/Cu atom." @default.
- W2590842758 created "2017-03-03" @default.
- W2590842758 creator A5029160325 @default.
- W2590842758 creator A5033229730 @default.
- W2590842758 creator A5089894349 @default.
- W2590842758 date "2017-02-21" @default.
- W2590842758 modified "2023-10-17" @default.
- W2590842758 title "Focused electron beam induced deposition of copper with high resolution and purity from aqueous solutions" @default.
- W2590842758 cites W1523525071 @default.
- W2590842758 cites W1594837225 @default.
- W2590842758 cites W1846200327 @default.
- W2590842758 cites W1916752460 @default.
- W2590842758 cites W1926950498 @default.
- W2590842758 cites W1971574427 @default.
- W2590842758 cites W1977441160 @default.
- W2590842758 cites W1988239752 @default.
- W2590842758 cites W1988817792 @default.
- W2590842758 cites W1993737560 @default.
- W2590842758 cites W1994674287 @default.
- W2590842758 cites W2003945920 @default.
- W2590842758 cites W2019510419 @default.
- W2590842758 cites W2027228089 @default.
- W2590842758 cites W2035411738 @default.
- W2590842758 cites W2039563468 @default.
- W2590842758 cites W2044225618 @default.
- W2590842758 cites W2045018157 @default.
- W2590842758 cites W2046532581 @default.
- W2590842758 cites W2048926109 @default.
- W2590842758 cites W2054320741 @default.
- W2590842758 cites W2054637705 @default.
- W2590842758 cites W2061779697 @default.
- W2590842758 cites W2074389252 @default.
- W2590842758 cites W2079239402 @default.
- W2590842758 cites W2090807441 @default.
- W2590842758 cites W2094341809 @default.
- W2590842758 cites W2095829102 @default.
- W2590842758 cites W2103480251 @default.
- W2590842758 cites W2107058570 @default.
- W2590842758 cites W2112565924 @default.
- W2590842758 cites W2146522006 @default.
- W2590842758 cites W2227278139 @default.
- W2590842758 cites W2290299620 @default.
- W2590842758 cites W2318683613 @default.
- W2590842758 cites W2396073886 @default.
- W2590842758 cites W2414962559 @default.
- W2590842758 cites W2505408407 @default.
- W2590842758 cites W4229489111 @default.
- W2590842758 cites W4240791359 @default.
- W2590842758 cites W813588687 @default.
- W2590842758 doi "https://doi.org/10.1088/1361-6528/aa5a4a" @default.
- W2590842758 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/28220760" @default.
- W2590842758 hasPublicationYear "2017" @default.
- W2590842758 type Work @default.
- W2590842758 sameAs 2590842758 @default.
- W2590842758 citedByCount "12" @default.
- W2590842758 countsByYear W25908427582017 @default.
- W2590842758 countsByYear W25908427582018 @default.
- W2590842758 countsByYear W25908427582019 @default.
- W2590842758 countsByYear W25908427582020 @default.
- W2590842758 countsByYear W25908427582021 @default.
- W2590842758 crossrefType "journal-article" @default.
- W2590842758 hasAuthorship W2590842758A5029160325 @default.
- W2590842758 hasAuthorship W2590842758A5033229730 @default.
- W2590842758 hasAuthorship W2590842758A5089894349 @default.
- W2590842758 hasBestOaLocation W25908427582 @default.
- W2590842758 hasConcept C113196181 @default.
- W2590842758 hasConcept C127413603 @default.
- W2590842758 hasConcept C151730666 @default.
- W2590842758 hasConcept C178790620 @default.
- W2590842758 hasConcept C184651966 @default.
- W2590842758 hasConcept C185592680 @default.
- W2590842758 hasConcept C191897082 @default.
- W2590842758 hasConcept C192562407 @default.
- W2590842758 hasConcept C2778199549 @default.
- W2590842758 hasConcept C2816523 @default.
- W2590842758 hasConcept C42360764 @default.
- W2590842758 hasConcept C544778455 @default.
- W2590842758 hasConcept C64297162 @default.
- W2590842758 hasConcept C86803240 @default.
- W2590842758 hasConceptScore W2590842758C113196181 @default.
- W2590842758 hasConceptScore W2590842758C127413603 @default.
- W2590842758 hasConceptScore W2590842758C151730666 @default.
- W2590842758 hasConceptScore W2590842758C178790620 @default.
- W2590842758 hasConceptScore W2590842758C184651966 @default.
- W2590842758 hasConceptScore W2590842758C185592680 @default.
- W2590842758 hasConceptScore W2590842758C191897082 @default.
- W2590842758 hasConceptScore W2590842758C192562407 @default.
- W2590842758 hasConceptScore W2590842758C2778199549 @default.
- W2590842758 hasConceptScore W2590842758C2816523 @default.
- W2590842758 hasConceptScore W2590842758C42360764 @default.
- W2590842758 hasConceptScore W2590842758C544778455 @default.
- W2590842758 hasConceptScore W2590842758C64297162 @default.
- W2590842758 hasConceptScore W2590842758C86803240 @default.
- W2590842758 hasFunder F4320306076 @default.
- W2590842758 hasIssue "12" @default.
- W2590842758 hasLocation W25908427581 @default.
- W2590842758 hasLocation W25908427582 @default.
- W2590842758 hasLocation W25908427583 @default.