FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2593053425> ?p ?o ?g. }

• W2593053425 endingPage "04CB03" @default.
• W2593053425 startingPage "04CB03" @default.
• W2593053425 abstract "We experimentally studied the material structures of two-/three-dimensional (2D/3D) silicon carbon layers Si1−YCY with Y ≤ 0.25 and 5 ≤ NL ≤ 162 [NL is the atomic layer number of Si1−YCY)] on buried oxide (BOX), which were fabricated by hot-C+-ion implantation into a (100) silicon-on-insulator (SOI) substrate before an oxidation process. A 2D Si layer was also fabricated as a reference. The C 1s spectrum obtained by X-ray photoemission spectroscopy shows that the implanted C atoms segregate at the oxide interface. Using a scanning transmission electron microscope and a high-resolution scanning transmission electron microscope to observe cross sections of Si0.75C0.25 layers, 2-nm-thick 3C-SiC layers were found be partially formed in the C segregation layer near the BOX interface. At Y > 0.1 and 5 ≤ NL ≤ 162, we observed very strong photoluminescence (PL) emission in the UV/visible regions from a 3C-SiC area and a Si1−YCY area in the C segregation layer, whereas a 2D Si emitted weak PL photons only at NL < 10. Thus, the silicon carbon technique is very promising for Si photonics and bandgap engineering in CMOS." @default.
• W2593053425 created "2017-03-16" @default.
• W2593053425 creator A5004287897 @default.
• W2593053425 creator A5013959145 @default.
• W2593053425 creator A5039332549 @default.
• W2593053425 creator A5040692592 @default.
• W2593053425 creator A5073111241 @default.
• W2593053425 date "2017-03-08" @default.
• W2593053425 modified "2023-09-25" @default.
• W2593053425 title "Material structure of two-/three-dimensional Si–C layers fabricated by hot-C⁺-ion implantation into Si-on-insulator substrate" @default.
• W2593053425 cites W1528549966 @default.
• W2593053425 cites W1536904167 @default.
• W2593053425 cites W1617693383 @default.
• W2593053425 cites W1963644796 @default.
• W2593053425 cites W1971540010 @default.
• W2593053425 cites W1974726507 @default.
• W2593053425 cites W1981023435 @default.
• W2593053425 cites W1991581353 @default.
• W2593053425 cites W1998866792 @default.
• W2593053425 cites W2001440331 @default.
• W2593053425 cites W2007482718 @default.
• W2593053425 cites W2011531724 @default.
• W2593053425 cites W2015114638 @default.
• W2593053425 cites W2015585976 @default.
• W2593053425 cites W2017603398 @default.
• W2593053425 cites W2022110194 @default.
• W2593053425 cites W2038997236 @default.
• W2593053425 cites W2050270062 @default.
• W2593053425 cites W2050654024 @default.
• W2593053425 cites W2051307234 @default.
• W2593053425 cites W2053395134 @default.
• W2593053425 cites W2069789228 @default.
• W2593053425 cites W2079518888 @default.
• W2593053425 cites W2084348779 @default.
• W2593053425 cites W2089666161 @default.
• W2593053425 cites W2114011565 @default.
• W2593053425 cites W2125942389 @default.
• W2593053425 cites W2150097652 @default.
• W2593053425 cites W2167313051 @default.
• W2593053425 cites W2290290784 @default.
• W2593053425 cites W2477251129 @default.
• W2593053425 cites W4244550423 @default.
• W2593053425 cites W4251431762 @default.
• W2593053425 doi "https://doi.org/10.7567/jjap.56.04cb03" @default.
• W2593053425 hasPublicationYear "2017" @default.
• W2593053425 type Work @default.
• W2593053425 sameAs 2593053425 @default.
• W2593053425 citedByCount "9" @default.
• W2593053425 countsByYear W25930534252018 @default.
• W2593053425 countsByYear W25930534252020 @default.
• W2593053425 countsByYear W25930534252021 @default.
• W2593053425 countsByYear W25930534252022 @default.
• W2593053425 countsByYear W25930534252023 @default.
• W2593053425 crossrefType "journal-article" @default.
• W2593053425 hasAuthorship W2593053425A5004287897 @default.
• W2593053425 hasAuthorship W2593053425A5013959145 @default.
• W2593053425 hasAuthorship W2593053425A5039332549 @default.
• W2593053425 hasAuthorship W2593053425A5040692592 @default.
• W2593053425 hasAuthorship W2593053425A5073111241 @default.
• W2593053425 hasConcept C111368507 @default.
• W2593053425 hasConcept C113196181 @default.
• W2593053425 hasConcept C121332964 @default.
• W2593053425 hasConcept C127313418 @default.
• W2593053425 hasConcept C145148216 @default.
• W2593053425 hasConcept C146088050 @default.
• W2593053425 hasConcept C159985019 @default.
• W2593053425 hasConcept C161368742 @default.
• W2593053425 hasConcept C171250308 @default.
• W2593053425 hasConcept C175708663 @default.
• W2593053425 hasConcept C178790620 @default.
• W2593053425 hasConcept C185592680 @default.
• W2593053425 hasConcept C192562407 @default.
• W2593053425 hasConcept C193016168 @default.
• W2593053425 hasConcept C26771246 @default.
• W2593053425 hasConcept C2777289219 @default.
• W2593053425 hasConcept C2779227376 @default.
• W2593053425 hasConcept C41823505 @default.
• W2593053425 hasConcept C43617362 @default.
• W2593053425 hasConcept C46141821 @default.
• W2593053425 hasConcept C49040817 @default.
• W2593053425 hasConcept C53143962 @default.
• W2593053425 hasConcept C544956773 @default.
• W2593053425 hasConcept C85080765 @default.
• W2593053425 hasConceptScore W2593053425C111368507 @default.
• W2593053425 hasConceptScore W2593053425C113196181 @default.
• W2593053425 hasConceptScore W2593053425C121332964 @default.
• W2593053425 hasConceptScore W2593053425C127313418 @default.
• W2593053425 hasConceptScore W2593053425C145148216 @default.
• W2593053425 hasConceptScore W2593053425C146088050 @default.
• W2593053425 hasConceptScore W2593053425C159985019 @default.
• W2593053425 hasConceptScore W2593053425C161368742 @default.
• W2593053425 hasConceptScore W2593053425C171250308 @default.
• W2593053425 hasConceptScore W2593053425C175708663 @default.
• W2593053425 hasConceptScore W2593053425C178790620 @default.
• W2593053425 hasConceptScore W2593053425C185592680 @default.
• W2593053425 hasConceptScore W2593053425C192562407 @default.
• W2593053425 hasConceptScore W2593053425C193016168 @default.
• W2593053425 hasConceptScore W2593053425C26771246 @default.

• next