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• W2593173487 endingPage "293" @default.
• W2593173487 startingPage "283" @default.
• W2593173487 abstract "A new materials group to implement dense wavelength division multiplexing (DWDM) in Si photonics is proposed. A large thermo-optic (TO) coefficient of Si malfunctions multiplexer/demultiplexer (MUX/DEMUX) on a chip under thermal fluctuation, and thus DWDM implementation, has been one of the most challenging targets in Si photonics. The present study specifies an optical materials group for DWDM by a systematic survey of their TO coefficients and refractive indices. The group is classified as mid-index contrast optics (MiDex) materials, and non-stoichiometric silicon nitride (SiNx) is chosen to demonstrate its significant thermal stability. The TO coefficient of non-stoichiometric SiNx is precisely measured in the temperature range 24-76 °C using the SiNx rings prepared by two methods: chemical vapor deposition (CVD) and physical vapor deposition (PVD). The CVD-SiNx ring reveals nearly the same TO coefficient reported for stoichiometric CVD-Si3N4, while the value for the PVD-SiNx ring is slightly higher. Both SiNx rings lock their resonance frequencies within 100 GHz in this temperature range. Since CVD-SiNx needs a high temperature annealing to reduce N-H bond absorption, it is concluded that PVD-SiNx is suited as a MiDex material introduced in the CMOS back-end-of-line. Further stabilization is required, considering the crosstalk between two channels; a 'silicone' polymer is employed to compensate for the temperature fluctuation using its negative TO coefficient, called athermalization. This demonstrates that the resonance of these SiNx rings is locked within 50 GHz at the same temperature range in the wavelength range 1460-1620 nm (the so-called S, C, and L bands in optical fiber communication networks). A further survey on the MiDex materials strongly suggests that Al2O3, Ga2O3 Ta2O5, HfO2 and their alloys should provide even more stable platforms for DWDM implementation in MiDex photonics. It is discussed that the MiDex photonics will find various applications such as medical and environmental sensing and in-vehicle data-communication." @default.
• W2593173487 created "2017-03-16" @default.
• W2593173487 creator A5022049957 @default.
• W2593173487 creator A5031201064 @default.
• W2593173487 creator A5036453737 @default.
• W2593173487 creator A5042133585 @default.
• W2593173487 creator A5042544849 @default.
• W2593173487 creator A5046121603 @default.
• W2593173487 creator A5052528832 @default.
• W2593173487 creator A5053688868 @default.
• W2593173487 creator A5061380560 @default.
• W2593173487 creator A5072488884 @default.
• W2593173487 date "2017-04-13" @default.
• W2593173487 modified "2023-10-02" @default.
• W2593173487 title "A new material platform of Si photonics for implementing architecture of dense wavelength division multiplexing on Si bulk wafer" @default.
• W2593173487 cites W1491092137 @default.
• W2593173487 cites W1503446415 @default.
• W2593173487 cites W1565759351 @default.
• W2593173487 cites W1969948398 @default.
• W2593173487 cites W1975476066 @default.
• W2593173487 cites W1976590877 @default.
• W2593173487 cites W1980679528 @default.
• W2593173487 cites W1981688747 @default.
• W2593173487 cites W1993257842 @default.
• W2593173487 cites W1996488513 @default.
• W2593173487 cites W1996836797 @default.
• W2593173487 cites W2012346521 @default.
• W2593173487 cites W2019017977 @default.
• W2593173487 cites W2038005878 @default.
• W2593173487 cites W2039900251 @default.
• W2593173487 cites W2044838462 @default.
• W2593173487 cites W2046751182 @default.
• W2593173487 cites W2051234647 @default.
• W2593173487 cites W2053910715 @default.
• W2593173487 cites W2057300287 @default.
• W2593173487 cites W2058127100 @default.
• W2593173487 cites W2058639886 @default.
• W2593173487 cites W2061592382 @default.
• W2593173487 cites W2063475611 @default.
• W2593173487 cites W2066167410 @default.
• W2593173487 cites W2081474905 @default.
• W2593173487 cites W2103979985 @default.
• W2593173487 cites W2109874506 @default.
• W2593173487 cites W2114424202 @default.
• W2593173487 cites W2137715586 @default.
• W2593173487 cites W2138182818 @default.
• W2593173487 cites W2142488978 @default.
• W2593173487 cites W2144282368 @default.
• W2593173487 cites W2145960122 @default.
• W2593173487 cites W2158874186 @default.
• W2593173487 cites W2165104196 @default.
• W2593173487 cites W2171320851 @default.
• W2593173487 cites W2172579984 @default.
• W2593173487 cites W2220870060 @default.
• W2593173487 cites W2247445458 @default.
• W2593173487 cites W2253797109 @default.
• W2593173487 cites W2274305270 @default.
• W2593173487 cites W2476591672 @default.
• W2593173487 cites W3098675477 @default.
• W2593173487 cites W4205263653 @default.
• W2593173487 cites W4233652713 @default.
• W2593173487 cites W4246973366 @default.
• W2593173487 cites W4382862449 @default.
• W2593173487 cites W2576894988 @default.
• W2593173487 doi "https://doi.org/10.1080/14686996.2017.1301193" @default.
• W2593173487 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/5439400" @default.
• W2593173487 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/28567174" @default.
• W2593173487 hasPublicationYear "2017" @default.
• W2593173487 type Work @default.
• W2593173487 sameAs 2593173487 @default.
• W2593173487 citedByCount "28" @default.
• W2593173487 countsByYear W25931734872017 @default.
• W2593173487 countsByYear W25931734872018 @default.
• W2593173487 countsByYear W25931734872019 @default.
• W2593173487 countsByYear W25931734872020 @default.
• W2593173487 countsByYear W25931734872021 @default.
• W2593173487 countsByYear W25931734872022 @default.
• W2593173487 countsByYear W25931734872023 @default.
• W2593173487 crossrefType "journal-article" @default.
• W2593173487 hasAuthorship W2593173487A5022049957 @default.
• W2593173487 hasAuthorship W2593173487A5031201064 @default.
• W2593173487 hasAuthorship W2593173487A5036453737 @default.
• W2593173487 hasAuthorship W2593173487A5042133585 @default.
• W2593173487 hasAuthorship W2593173487A5042544849 @default.
• W2593173487 hasAuthorship W2593173487A5046121603 @default.
• W2593173487 hasAuthorship W2593173487A5052528832 @default.
• W2593173487 hasAuthorship W2593173487A5053688868 @default.
• W2593173487 hasAuthorship W2593173487A5061380560 @default.
• W2593173487 hasAuthorship W2593173487A5072488884 @default.
• W2593173487 hasBestOaLocation W25931734871 @default.
• W2593173487 hasConcept C119423029 @default.
• W2593173487 hasConcept C120665830 @default.
• W2593173487 hasConcept C121332964 @default.
• W2593173487 hasConcept C127413603 @default.
• W2593173487 hasConcept C159985019 @default.
• W2593173487 hasConcept C160671074 @default.
• W2593173487 hasConcept C160724564 @default.
• W2593173487 hasConcept C16643434 @default.

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