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- W2594923188 abstract "The convergence of top-down microfabrication with bottom-up assembling of nanoparticles to make compatible different length scales, architectures, materials, manufacturing methods is the basis for the production of novel classes of miniaturized devices. This requires a paradigm shift in R&D approaches towards the fabrication and characterization of hybrid systems where heterogeneous nanoscale materials and nanoparticles must coexist and integrate with traditional microfabrication technologies. Production methods of nanoparticles in the gas phase are inherently prone to meet these requirements. Supersonic cluster beam deposition (SCBD) has emerged among other techniques based on the production and manipulation of gas phase nanoparticles as a tool with a degree of complexity and maturity that makes this approach very effective for functional and length scale integration. The transition from the use of SCBD as a tool for basic research to a method for the fabrication of micro and nanodevices is driven by the capability of manipulating neutral clusters through supersonic expansions and aerodynamic focusing. A careful control on the aerodynamic conditions during cluster production, extraction and deposition is of fundamental importance to meet the requisites necessary for applications: high intensity, stability, repeatability, high lateral resolution, parallel processing." @default.
- W2594923188 created "2017-03-16" @default.
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- W2594923188 date "2017-03-03" @default.
- W2594923188 modified "2023-09-26" @default.
- W2594923188 title "Nano‐ and Micromanufacturing with Nanoparticles Produced in the Gas Phase: An Emerging Tool for Functional and Length‐Scale Integration" @default.
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- W2594923188 doi "https://doi.org/10.1002/9783527698417.ch19" @default.
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