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- W2596032078 abstract "Ion sources based on microwave discharge enables high ion beam currents due to the effective ionization of the microwave plasma. The analysis of different ion sources has shown that the creation of ion sources based on microwave plasma is quite realized technical task. Modeling and calculation of sources cavity resonators were carried out. The possibilities of using the rectangular cavity with oscillation in TE101 and the quarter wave coaxial cavity to the working chambers of ion sources based on microwave discharge have been shown. Approaches to the creation of new types of working chambers of ion sources based on microwave discharge have determined." @default.
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- W2596032078 date "2016-09-01" @default.
- W2596032078 modified "2023-09-26" @default.
- W2596032078 title "Modeling of gas-discharge chamber of the microwave ion source" @default.
- W2596032078 doi "https://doi.org/10.1109/apede.2016.7878912" @default.
- W2596032078 hasPublicationYear "2016" @default.
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