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- W2597766871 abstract "In this work, we present an attractive and novel fabrication technique that can produce highly-controlled silicon-based nanostructures in wafer-scale by a seldom used material in IC fabrication, amorphous silicon (α-Si), as an etch mask. The α-Si mask pattern is precisely transferred into the underlying SiO2 substrate material with a high fidelity by a novel top-down fabrication. It is the first time for α-Si film used as an etch mask to fabricate various Si-based nanostructures. It is observed that the α-Si mask can significantly reduce the pattern edge roughness and achieve highly uniform and smooth sidewalls. SiO2 nanostructures directly fabricated can be served as nanotemplates to transfer into the underlying substrates such as silicon, germanium, transistor gate or other dielectric materials to form electrically functional nanostructures and devices. Several typical Si-based nanostructures, such as nanoline, nanofin and transistor gate patterning, have been fabricated successfully using the simple α-Si material combining with electron beam lithography. Our results demonstrate that the Si-based nanostructures as small as sub-20 nm may be achievable. More significantly, the novel approach is a potentially universal method that is fully compatible with the current existing Si-based CMOS technologies." @default.
- W2597766871 created "2017-04-07" @default.
- W2597766871 creator A5000869304 @default.
- W2597766871 creator A5024729319 @default.
- W2597766871 date "2017-03-21" @default.
- W2597766871 modified "2023-09-23" @default.
- W2597766871 title "Facile fabrication of Si-based nanostructures" @default.
- W2597766871 doi "https://doi.org/10.1117/12.2271503" @default.
- W2597766871 hasPublicationYear "2017" @default.
- W2597766871 type Work @default.
- W2597766871 sameAs 2597766871 @default.
- W2597766871 citedByCount "1" @default.
- W2597766871 countsByYear W25977668712019 @default.
- W2597766871 crossrefType "proceedings-article" @default.
- W2597766871 hasAuthorship W2597766871A5000869304 @default.
- W2597766871 hasAuthorship W2597766871A5024729319 @default.
- W2597766871 hasConcept C111368507 @default.
- W2597766871 hasConcept C119599485 @default.
- W2597766871 hasConcept C127313418 @default.
- W2597766871 hasConcept C127413603 @default.
- W2597766871 hasConcept C136525101 @default.
- W2597766871 hasConcept C142724271 @default.
- W2597766871 hasConcept C160671074 @default.
- W2597766871 hasConcept C165801399 @default.
- W2597766871 hasConcept C171250308 @default.
- W2597766871 hasConcept C172385210 @default.
- W2597766871 hasConcept C186187911 @default.
- W2597766871 hasConcept C192562407 @default.
- W2597766871 hasConcept C204223013 @default.
- W2597766871 hasConcept C204787440 @default.
- W2597766871 hasConcept C2777289219 @default.
- W2597766871 hasConcept C49040817 @default.
- W2597766871 hasConcept C544956773 @default.
- W2597766871 hasConcept C71924100 @default.
- W2597766871 hasConceptScore W2597766871C111368507 @default.
- W2597766871 hasConceptScore W2597766871C119599485 @default.
- W2597766871 hasConceptScore W2597766871C127313418 @default.
- W2597766871 hasConceptScore W2597766871C127413603 @default.
- W2597766871 hasConceptScore W2597766871C136525101 @default.
- W2597766871 hasConceptScore W2597766871C142724271 @default.
- W2597766871 hasConceptScore W2597766871C160671074 @default.
- W2597766871 hasConceptScore W2597766871C165801399 @default.
- W2597766871 hasConceptScore W2597766871C171250308 @default.
- W2597766871 hasConceptScore W2597766871C172385210 @default.
- W2597766871 hasConceptScore W2597766871C186187911 @default.
- W2597766871 hasConceptScore W2597766871C192562407 @default.
- W2597766871 hasConceptScore W2597766871C204223013 @default.
- W2597766871 hasConceptScore W2597766871C204787440 @default.
- W2597766871 hasConceptScore W2597766871C2777289219 @default.
- W2597766871 hasConceptScore W2597766871C49040817 @default.
- W2597766871 hasConceptScore W2597766871C544956773 @default.
- W2597766871 hasConceptScore W2597766871C71924100 @default.
- W2597766871 hasLocation W25977668711 @default.
- W2597766871 hasOpenAccess W2597766871 @default.
- W2597766871 hasPrimaryLocation W25977668711 @default.
- W2597766871 hasRelatedWork W1493044404 @default.
- W2597766871 hasRelatedWork W1500194197 @default.
- W2597766871 hasRelatedWork W1523572128 @default.
- W2597766871 hasRelatedWork W1591386985 @default.
- W2597766871 hasRelatedWork W1992832691 @default.
- W2597766871 hasRelatedWork W1995997416 @default.
- W2597766871 hasRelatedWork W2017528100 @default.
- W2597766871 hasRelatedWork W2023072083 @default.
- W2597766871 hasRelatedWork W2048962038 @default.
- W2597766871 hasRelatedWork W2056433056 @default.
- W2597766871 hasRelatedWork W2102653718 @default.
- W2597766871 hasRelatedWork W2103961557 @default.
- W2597766871 hasRelatedWork W2118463270 @default.
- W2597766871 hasRelatedWork W2156952014 @default.
- W2597766871 hasRelatedWork W2807795365 @default.
- W2597766871 hasRelatedWork W2974349096 @default.
- W2597766871 hasRelatedWork W2981607885 @default.
- W2597766871 hasRelatedWork W3026492121 @default.
- W2597766871 hasRelatedWork W342004930 @default.
- W2597766871 hasRelatedWork W791269440 @default.
- W2597766871 isParatext "false" @default.
- W2597766871 isRetracted "false" @default.
- W2597766871 magId "2597766871" @default.
- W2597766871 workType "article" @default.