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• W2598020147 abstract "Abstract Inductively coupled plasma reactive ion etching of Pd thin films with TiN hard masks was carried out in a CH 3 COOH/Ar gas mixture. The addition of CH 3 COOH to Ar gas decreased the etch rate but a good etch profile with a high degree of anisotropy was obtained at 50% CH 3 COOH/Ar. Variations in the etch parameters showed that high inductively coupled plasma power and dc-bias voltage improved the etch profile. X-ray photoelectron spectroscopy and optical emission spectroscopy results revealed that the Pd films in CH 3 COOH/Ar gas followed the sputtering etch mechanism assisted by the oxidation and sidewall protection provided by polymer films." @default.
• W2598020147 created "2017-04-07" @default.
• W2598020147 creator A5030592156 @default.
• W2598020147 creator A5032155136 @default.
• W2598020147 creator A5035371275 @default.
• W2598020147 creator A5049011660 @default.
• W2598020147 creator A5050339575 @default.
• W2598020147 date "2017-09-01" @default.
• W2598020147 modified "2023-09-23" @default.
• W2598020147 title "Investigation on etching characteristics of Pd thin films using CH 3 COOH/Ar gas" @default.
• W2598020147 cites W1658744488 @default.
• W2598020147 cites W1969737640 @default.
• W2598020147 cites W1977959321 @default.
• W2598020147 cites W1985270023 @default.
• W2598020147 cites W1987367149 @default.
• W2598020147 cites W1988431200 @default.
• W2598020147 cites W1988646820 @default.
• W2598020147 cites W1990875404 @default.
• W2598020147 cites W1996156132 @default.
• W2598020147 cites W2001284778 @default.
• W2598020147 cites W2015298320 @default.
• W2598020147 cites W2021668518 @default.
• W2598020147 cites W2029586073 @default.
• W2598020147 cites W2035450916 @default.
• W2598020147 cites W2035925590 @default.
• W2598020147 cites W2038933846 @default.
• W2598020147 cites W2048335537 @default.
• W2598020147 cites W2109331413 @default.
• W2598020147 cites W2113012235 @default.
• W2598020147 cites W2138818991 @default.
• W2598020147 cites W2139381604 @default.
• W2598020147 cites W2140570622 @default.
• W2598020147 cites W2154476485 @default.
• W2598020147 doi "https://doi.org/10.1016/j.tsf.2017.03.057" @default.
• W2598020147 hasPublicationYear "2017" @default.
• W2598020147 type Work @default.
• W2598020147 sameAs 2598020147 @default.
• W2598020147 citedByCount "0" @default.
• W2598020147 crossrefType "journal-article" @default.
• W2598020147 hasAuthorship W2598020147A5030592156 @default.
• W2598020147 hasAuthorship W2598020147A5032155136 @default.
• W2598020147 hasAuthorship W2598020147A5035371275 @default.
• W2598020147 hasAuthorship W2598020147A5049011660 @default.
• W2598020147 hasAuthorship W2598020147A5050339575 @default.
• W2598020147 hasConcept C100460472 @default.
• W2598020147 hasConcept C113196181 @default.
• W2598020147 hasConcept C121332964 @default.
• W2598020147 hasConcept C127413603 @default.
• W2598020147 hasConcept C130472188 @default.
• W2598020147 hasConcept C171250308 @default.
• W2598020147 hasConcept C175708663 @default.
• W2598020147 hasConcept C178790620 @default.
• W2598020147 hasConcept C185592680 @default.
• W2598020147 hasConcept C19067145 @default.
• W2598020147 hasConcept C192562407 @default.
• W2598020147 hasConcept C22423302 @default.
• W2598020147 hasConcept C2779227376 @default.
• W2598020147 hasConcept C42360764 @default.
• W2598020147 hasConcept C43617362 @default.
• W2598020147 hasConcept C525849907 @default.
• W2598020147 hasConcept C62520636 @default.
• W2598020147 hasConcept C82706917 @default.
• W2598020147 hasConcept C95974651 @default.
• W2598020147 hasConceptScore W2598020147C100460472 @default.
• W2598020147 hasConceptScore W2598020147C113196181 @default.
• W2598020147 hasConceptScore W2598020147C121332964 @default.
• W2598020147 hasConceptScore W2598020147C127413603 @default.
• W2598020147 hasConceptScore W2598020147C130472188 @default.
• W2598020147 hasConceptScore W2598020147C171250308 @default.
• W2598020147 hasConceptScore W2598020147C175708663 @default.
• W2598020147 hasConceptScore W2598020147C178790620 @default.
• W2598020147 hasConceptScore W2598020147C185592680 @default.
• W2598020147 hasConceptScore W2598020147C19067145 @default.
• W2598020147 hasConceptScore W2598020147C192562407 @default.
• W2598020147 hasConceptScore W2598020147C22423302 @default.
• W2598020147 hasConceptScore W2598020147C2779227376 @default.
• W2598020147 hasConceptScore W2598020147C42360764 @default.
• W2598020147 hasConceptScore W2598020147C43617362 @default.
• W2598020147 hasConceptScore W2598020147C525849907 @default.
• W2598020147 hasConceptScore W2598020147C62520636 @default.
• W2598020147 hasConceptScore W2598020147C82706917 @default.
• W2598020147 hasConceptScore W2598020147C95974651 @default.
• W2598020147 hasFunder F4320321681 @default.
• W2598020147 hasLocation W25980201471 @default.
• W2598020147 hasOpenAccess W2598020147 @default.
• W2598020147 hasPrimaryLocation W25980201471 @default.
• W2598020147 hasRelatedWork W1975935558 @default.
• W2598020147 hasRelatedWork W1986462052 @default.
• W2598020147 hasRelatedWork W2001284778 @default.
• W2598020147 hasRelatedWork W2024422983 @default.
• W2598020147 hasRelatedWork W2037095775 @default.
• W2598020147 hasRelatedWork W2045544987 @default.
• W2598020147 hasRelatedWork W2054833354 @default.
• W2598020147 hasRelatedWork W2076275872 @default.
• W2598020147 hasRelatedWork W2112593558 @default.
• W2598020147 hasRelatedWork W2114124279 @default.
• W2598020147 hasRelatedWork W2116331318 @default.
• W2598020147 hasRelatedWork W2137352882 @default.
• W2598020147 hasRelatedWork W2154476485 @default.
• W2598020147 hasRelatedWork W2507143311 @default.

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