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- W2598558780 abstract "摘要 利用带折射修正的布喇格衍射定律和薄膜光学理论分析了低角Ｘ射线衍射谱中出现的一系列现象，导出了多层膜周期厚度和周期中不同材料间的配比率的计算公式，对多层膜的低角Ｘ射线衍射谱中主峰间的次峰现象作出了解释，并对低角Ｘ射线衍射测量单层膜厚度进行分析，给出了精确的测厚公式。 Abstract The period thickness mean refraction corrected factor and the ratio between two difference materials in a period can be deduced from the Bragg equation with refraction correction. Based on this Bragg's law and theory of optical thin film, the formula introduced in this paper have been verified in theory and experiment with short-period Mo/Si multilayers. 作者及机构信息 邵建达, 范正修, 殷功杰, 袁利祥 1. 中国科学院上海光学精密机械研究所 Authors and contacts SHAO JIAN-DA, FAN ZHENG-XIU, YIN GONG-JIE, YUAN LI-XIANG 1. 中国科学院上海光学精密机械研究所 参考文献 施引文献" @default.
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- W2598558780 date "1994-01-01" @default.
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- W2598558780 title "SMALL-ANGLE X-RAY DIFFRACTION IN ANALYSES OF THE STRUCTURE OF COATINGS" @default.
- W2598558780 doi "https://doi.org/10.7498/aps.43.958" @default.
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