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- W2600179920 abstract "구리는 낮은 비저항과 뛰어난 electromigration 내성 특성 때문에 ULSI공정에 있어서 알루미늄을 대체할 새로운 배선재료로서 각광 받고 있다. 그러나, 구리는 Si나 SiO_(2)로 빠르게 확산되므로 구리의 확산을 막아줄 수 있는 확산 방지막의 사용이 필수적이다. 본 연구에서는 tetrakis [dimethylamino]titanium(TDMAT)을 ..." @default.
- W2600179920 created "2017-04-07" @default.
- W2600179920 creator A5029036569 @default.
- W2600179920 date "2002-01-01" @default.
- W2600179920 modified "2023-09-23" @default.
- W2600179920 title "원자층 단위 증착법을 이용한 titanium nitride의 제조" @default.
- W2600179920 hasPublicationYear "2002" @default.
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