Matches in SemOpenAlex for { <https://semopenalex.org/work/W2600532993> ?p ?o ?g. }
- W2600532993 abstract "Crystalline Ge and Si1−xGex alloys (x = 0.83, 0.77) of (100) orientation were implanted with 140 keV Ge− ions at fluences between 5×1015 to 3×1017 ions/cm2, and at temperatures between 23 °C and 200 °C. The energy deposition of the ions leads to the formation of porous structures consisting of columnar pores separated by narrow sidewalls. Their sizes were characterized with transmission electron microscopy, scanning electron microscopy, and small angle x-ray scattering. We show that the pore radius does not depend significantly on the ion fluence above 5×1015 ions/cm2, i.e., when the pores have already developed, yet the pore depth increases from 31 to 516 nm with increasing fluence. The sidewall thickness increases slightly with increasing Si content, while both the pore radius and the sidewall thickness increase at elevated implantation temperatures." @default.
- W2600532993 created "2017-04-07" @default.
- W2600532993 creator A5013201260 @default.
- W2600532993 creator A5018046302 @default.
- W2600532993 creator A5019920060 @default.
- W2600532993 creator A5024909821 @default.
- W2600532993 creator A5034468476 @default.
- W2600532993 creator A5044446707 @default.
- W2600532993 creator A5061855104 @default.
- W2600532993 creator A5090042052 @default.
- W2600532993 date "2017-03-21" @default.
- W2600532993 modified "2023-09-25" @default.
- W2600532993 title "Morphology of ion irradiation induced nano-porous structures in Ge and Si1−xGex alloys" @default.
- W2600532993 cites W138882371 @default.
- W2600532993 cites W1489931547 @default.
- W2600532993 cites W1969459467 @default.
- W2600532993 cites W1969555886 @default.
- W2600532993 cites W1970301880 @default.
- W2600532993 cites W1979851371 @default.
- W2600532993 cites W1987346221 @default.
- W2600532993 cites W1987830227 @default.
- W2600532993 cites W1994066201 @default.
- W2600532993 cites W1994856276 @default.
- W2600532993 cites W2002185373 @default.
- W2600532993 cites W2004050152 @default.
- W2600532993 cites W2006087368 @default.
- W2600532993 cites W2024565483 @default.
- W2600532993 cites W2047900592 @default.
- W2600532993 cites W2048386627 @default.
- W2600532993 cites W2059292755 @default.
- W2600532993 cites W2065569312 @default.
- W2600532993 cites W2066360032 @default.
- W2600532993 cites W2068060669 @default.
- W2600532993 cites W2069700862 @default.
- W2600532993 cites W2080376008 @default.
- W2600532993 cites W2084433750 @default.
- W2600532993 cites W2090433900 @default.
- W2600532993 cites W2092245184 @default.
- W2600532993 cites W2137484932 @default.
- W2600532993 cites W2157599717 @default.
- W2600532993 cites W2292640555 @default.
- W2600532993 cites W2325903549 @default.
- W2600532993 doi "https://doi.org/10.1063/1.4978592" @default.
- W2600532993 hasPublicationYear "2017" @default.
- W2600532993 type Work @default.
- W2600532993 sameAs 2600532993 @default.
- W2600532993 citedByCount "8" @default.
- W2600532993 countsByYear W26005329932017 @default.
- W2600532993 countsByYear W26005329932018 @default.
- W2600532993 countsByYear W26005329932019 @default.
- W2600532993 countsByYear W26005329932020 @default.
- W2600532993 countsByYear W26005329932021 @default.
- W2600532993 crossrefType "journal-article" @default.
- W2600532993 hasAuthorship W2600532993A5013201260 @default.
- W2600532993 hasAuthorship W2600532993A5018046302 @default.
- W2600532993 hasAuthorship W2600532993A5019920060 @default.
- W2600532993 hasAuthorship W2600532993A5024909821 @default.
- W2600532993 hasAuthorship W2600532993A5034468476 @default.
- W2600532993 hasAuthorship W2600532993A5044446707 @default.
- W2600532993 hasAuthorship W2600532993A5061855104 @default.
- W2600532993 hasAuthorship W2600532993A5090042052 @default.
- W2600532993 hasBestOaLocation W26005329932 @default.
- W2600532993 hasConcept C111337013 @default.
- W2600532993 hasConcept C113196181 @default.
- W2600532993 hasConcept C120665830 @default.
- W2600532993 hasConcept C121332964 @default.
- W2600532993 hasConcept C145148216 @default.
- W2600532993 hasConcept C146088050 @default.
- W2600532993 hasConcept C159985019 @default.
- W2600532993 hasConcept C171250308 @default.
- W2600532993 hasConcept C178635117 @default.
- W2600532993 hasConcept C178790620 @default.
- W2600532993 hasConcept C185544564 @default.
- W2600532993 hasConcept C185592680 @default.
- W2600532993 hasConcept C191486275 @default.
- W2600532993 hasConcept C192562407 @default.
- W2600532993 hasConcept C22078206 @default.
- W2600532993 hasConcept C26771246 @default.
- W2600532993 hasConcept C38652104 @default.
- W2600532993 hasConcept C41008148 @default.
- W2600532993 hasConcept C41823505 @default.
- W2600532993 hasConcept C43617362 @default.
- W2600532993 hasConcept C49040817 @default.
- W2600532993 hasConcept C544956773 @default.
- W2600532993 hasConcept C54998646 @default.
- W2600532993 hasConcept C550623735 @default.
- W2600532993 hasConcept C6648577 @default.
- W2600532993 hasConcept C8010536 @default.
- W2600532993 hasConceptScore W2600532993C111337013 @default.
- W2600532993 hasConceptScore W2600532993C113196181 @default.
- W2600532993 hasConceptScore W2600532993C120665830 @default.
- W2600532993 hasConceptScore W2600532993C121332964 @default.
- W2600532993 hasConceptScore W2600532993C145148216 @default.
- W2600532993 hasConceptScore W2600532993C146088050 @default.
- W2600532993 hasConceptScore W2600532993C159985019 @default.
- W2600532993 hasConceptScore W2600532993C171250308 @default.
- W2600532993 hasConceptScore W2600532993C178635117 @default.
- W2600532993 hasConceptScore W2600532993C178790620 @default.
- W2600532993 hasConceptScore W2600532993C185544564 @default.
- W2600532993 hasConceptScore W2600532993C185592680 @default.