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• W2600795404 endingPage "556" @default.
• W2600795404 startingPage "552" @default.
• W2600795404 abstract "The effects of negative DC substrate bias voltage on target current, condensation rate and electrical characteristics of deposited Ge films prepared by DC and RF double cathode sputtering system were investigated.The target current and the condensation rate increased with the substrate bias voltage but the electrical characteristics of the deposited Ge films deteriorated due to the bombardment of Ar ions accelerated by this voltage.By introducing another axiliary electrode and keeping the substrate potential equal to anode potential during deposition, the electrical characteristics of these films did not deteriorate." @default.
• W2600795404 created "2017-04-07" @default.
• W2600795404 creator A5009999939 @default.
• W2600795404 creator A5072640772 @default.
• W2600795404 date "1981-01-01" @default.
• W2600795404 modified "2023-09-26" @default.
• W2600795404 doi "https://doi.org/10.3131/jvsj.24.552" @default.
• W2600795404 hasPublicationYear "1981" @default.
• W2600795404 type Work @default.
• W2600795404 sameAs 2600795404 @default.
• W2600795404 citedByCount "0" @default.
• W2600795404 crossrefType "journal-article" @default.
• W2600795404 hasAuthorship W2600795404A5009999939 @default.
• W2600795404 hasAuthorship W2600795404A5072640772 @default.
• W2600795404 hasBestOaLocation W26007954041 @default.
• W2600795404 hasConcept C111368507 @default.
• W2600795404 hasConcept C113196181 @default.
• W2600795404 hasConcept C119599485 @default.
• W2600795404 hasConcept C121332964 @default.
• W2600795404 hasConcept C127313418 @default.
• W2600795404 hasConcept C127413603 @default.
• W2600795404 hasConcept C145148216 @default.
• W2600795404 hasConcept C147789679 @default.
• W2600795404 hasConcept C148043351 @default.
• W2600795404 hasConcept C151730666 @default.
• W2600795404 hasConcept C165801399 @default.
• W2600795404 hasConcept C171250308 @default.
• W2600795404 hasConcept C17525397 @default.
• W2600795404 hasConcept C178790620 @default.
• W2600795404 hasConcept C185592680 @default.
• W2600795404 hasConcept C19067145 @default.
• W2600795404 hasConcept C192562407 @default.
• W2600795404 hasConcept C200093464 @default.
• W2600795404 hasConcept C20254490 @default.
• W2600795404 hasConcept C22423302 @default.
• W2600795404 hasConcept C2777289219 @default.
• W2600795404 hasConcept C2816523 @default.
• W2600795404 hasConcept C43617362 @default.
• W2600795404 hasConcept C49040817 @default.
• W2600795404 hasConcept C49110097 @default.
• W2600795404 hasConcept C64297162 @default.
• W2600795404 hasConcept C86803240 @default.
• W2600795404 hasConcept C89395315 @default.
• W2600795404 hasConcept C97355855 @default.
• W2600795404 hasConceptScore W2600795404C111368507 @default.
• W2600795404 hasConceptScore W2600795404C113196181 @default.
• W2600795404 hasConceptScore W2600795404C119599485 @default.
• W2600795404 hasConceptScore W2600795404C121332964 @default.
• W2600795404 hasConceptScore W2600795404C127313418 @default.
• W2600795404 hasConceptScore W2600795404C127413603 @default.
• W2600795404 hasConceptScore W2600795404C145148216 @default.
• W2600795404 hasConceptScore W2600795404C147789679 @default.
• W2600795404 hasConceptScore W2600795404C148043351 @default.
• W2600795404 hasConceptScore W2600795404C151730666 @default.
• W2600795404 hasConceptScore W2600795404C165801399 @default.
• W2600795404 hasConceptScore W2600795404C171250308 @default.
• W2600795404 hasConceptScore W2600795404C17525397 @default.
• W2600795404 hasConceptScore W2600795404C178790620 @default.
• W2600795404 hasConceptScore W2600795404C185592680 @default.
• W2600795404 hasConceptScore W2600795404C19067145 @default.
• W2600795404 hasConceptScore W2600795404C192562407 @default.
• W2600795404 hasConceptScore W2600795404C200093464 @default.
• W2600795404 hasConceptScore W2600795404C20254490 @default.
• W2600795404 hasConceptScore W2600795404C22423302 @default.
• W2600795404 hasConceptScore W2600795404C2777289219 @default.
• W2600795404 hasConceptScore W2600795404C2816523 @default.
• W2600795404 hasConceptScore W2600795404C43617362 @default.
• W2600795404 hasConceptScore W2600795404C49040817 @default.
• W2600795404 hasConceptScore W2600795404C49110097 @default.
• W2600795404 hasConceptScore W2600795404C64297162 @default.
• W2600795404 hasConceptScore W2600795404C86803240 @default.
• W2600795404 hasConceptScore W2600795404C89395315 @default.
• W2600795404 hasConceptScore W2600795404C97355855 @default.
• W2600795404 hasIssue "10" @default.
• W2600795404 hasLocation W26007954041 @default.
• W2600795404 hasOpenAccess W2600795404 @default.
• W2600795404 hasPrimaryLocation W26007954041 @default.
• W2600795404 hasRelatedWork W1865608518 @default.
• W2600795404 hasRelatedWork W1968941233 @default.
• W2600795404 hasRelatedWork W1971115121 @default.
• W2600795404 hasRelatedWork W1996971827 @default.
• W2600795404 hasRelatedWork W2015114372 @default.
• W2600795404 hasRelatedWork W2031319172 @default.
• W2600795404 hasRelatedWork W2034359128 @default.
• W2600795404 hasRelatedWork W2036069757 @default.
• W2600795404 hasRelatedWork W2047177739 @default.
• W2600795404 hasRelatedWork W2069312878 @default.
• W2600795404 hasRelatedWork W2074998815 @default.
• W2600795404 hasRelatedWork W2081231529 @default.
• W2600795404 hasRelatedWork W2087609773 @default.
• W2600795404 hasRelatedWork W2092351990 @default.
• W2600795404 hasRelatedWork W210842737 @default.
• W2600795404 hasRelatedWork W2315053642 @default.
• W2600795404 hasRelatedWork W2545321633 @default.
• W2600795404 hasRelatedWork W772855109 @default.
• W2600795404 hasRelatedWork W865021113 @default.
• W2600795404 hasRelatedWork W200106743 @default.
• W2600795404 hasVolume "24" @default.

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