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- W2601689684 abstract "In this paper, we present a design technology co-optimization (DTCO) flow to pattern self-aligned via (SAV) using twomasks with grapho-epitaxy of lamella BCP and 193i for sub-7nm design. We show that it is necessary to consider bothmetal and via layers at the same time in creating design rules with process variations. Due to lamella DSA’s owncharacteristics, it can be easily applied in dense memory or SRAM applications for SAV patterning using traditionalsingle-material metal hard mask. However, to achieve two-mask SAV solution for logic applications, we need to applyalternating hard mask in metal to cut lamella DSA patterns without compromising the technology scaling." @default.
- W2601689684 created "2017-04-07" @default.
- W2601689684 creator A5000795174 @default.
- W2601689684 creator A5011839424 @default.
- W2601689684 creator A5021551685 @default.
- W2601689684 creator A5035972401 @default.
- W2601689684 creator A5040932462 @default.
- W2601689684 creator A5056495642 @default.
- W2601689684 creator A5063460712 @default.
- W2601689684 creator A5064766460 @default.
- W2601689684 creator A5076956256 @default.
- W2601689684 creator A5091637861 @default.
- W2601689684 date "2017-03-30" @default.
- W2601689684 modified "2023-09-23" @default.
- W2601689684 title "Design technology co-optimization (DTCO) study on self-aligned-via (SAV) with Lamella DSA for sub-7 nm technology" @default.
- W2601689684 cites W2055182387 @default.
- W2601689684 cites W2175612459 @default.
- W2601689684 cites W2525341469 @default.
- W2601689684 cites W2586124780 @default.
- W2601689684 cites W4249919275 @default.
- W2601689684 doi "https://doi.org/10.1117/12.2258056" @default.
- W2601689684 hasPublicationYear "2017" @default.
- W2601689684 type Work @default.
- W2601689684 sameAs 2601689684 @default.
- W2601689684 citedByCount "0" @default.
- W2601689684 crossrefType "proceedings-article" @default.
- W2601689684 hasAuthorship W2601689684A5000795174 @default.
- W2601689684 hasAuthorship W2601689684A5011839424 @default.
- W2601689684 hasAuthorship W2601689684A5021551685 @default.
- W2601689684 hasAuthorship W2601689684A5035972401 @default.
- W2601689684 hasAuthorship W2601689684A5040932462 @default.
- W2601689684 hasAuthorship W2601689684A5056495642 @default.
- W2601689684 hasAuthorship W2601689684A5063460712 @default.
- W2601689684 hasAuthorship W2601689684A5064766460 @default.
- W2601689684 hasAuthorship W2601689684A5076956256 @default.
- W2601689684 hasAuthorship W2601689684A5091637861 @default.
- W2601689684 hasConcept C136301237 @default.
- W2601689684 hasConcept C144024400 @default.
- W2601689684 hasConcept C159985019 @default.
- W2601689684 hasConcept C171250308 @default.
- W2601689684 hasConcept C192562407 @default.
- W2601689684 hasConcept C23528732 @default.
- W2601689684 hasConcept C2524010 @default.
- W2601689684 hasConcept C33923547 @default.
- W2601689684 hasConcept C36289849 @default.
- W2601689684 hasConcept C41008148 @default.
- W2601689684 hasConcept C49040817 @default.
- W2601689684 hasConcept C68043766 @default.
- W2601689684 hasConcept C9390403 @default.
- W2601689684 hasConcept C99844830 @default.
- W2601689684 hasConceptScore W2601689684C136301237 @default.
- W2601689684 hasConceptScore W2601689684C144024400 @default.
- W2601689684 hasConceptScore W2601689684C159985019 @default.
- W2601689684 hasConceptScore W2601689684C171250308 @default.
- W2601689684 hasConceptScore W2601689684C192562407 @default.
- W2601689684 hasConceptScore W2601689684C23528732 @default.
- W2601689684 hasConceptScore W2601689684C2524010 @default.
- W2601689684 hasConceptScore W2601689684C33923547 @default.
- W2601689684 hasConceptScore W2601689684C36289849 @default.
- W2601689684 hasConceptScore W2601689684C41008148 @default.
- W2601689684 hasConceptScore W2601689684C49040817 @default.
- W2601689684 hasConceptScore W2601689684C68043766 @default.
- W2601689684 hasConceptScore W2601689684C9390403 @default.
- W2601689684 hasConceptScore W2601689684C99844830 @default.
- W2601689684 hasLocation W26016896841 @default.
- W2601689684 hasOpenAccess W2601689684 @default.
- W2601689684 hasPrimaryLocation W26016896841 @default.
- W2601689684 hasRelatedWork W2173968817 @default.
- W2601689684 isParatext "false" @default.
- W2601689684 isRetracted "false" @default.
- W2601689684 magId "2601689684" @default.
- W2601689684 workType "article" @default.