Matches in SemOpenAlex for { <https://semopenalex.org/work/W2602407917> ?p ?o ?g. }
Showing items 1 to 69 of
69
with 100 items per page.
- W2602407917 abstract "Radio-frequency [rf] waves do not penetrate into a plasma and are damped within it. The electric field of the wave and plasma current are concentrated near the plasma boundary in a skin layer. Electrons can transport the plasma current away from the skin layer due to their thermal motion. As a result, the width of the skin layer increases when electron temperature effects are taken into account. This phenomenon is called anomalous skin effect. The anomalous penetration of the rf electric field occurs not only for transversely propagating to the plasma boundary wave (inductively coupled plasmas) but also for the wave propagating along the plasma boundary (capacitively coupled plasmas). Such anomalous penetration of the rf field modifies the structure of the capacitive sheath. Recent advances in the nonlinear, non-local theory of the capacitive sheath are reported. It is shown that separating the electric field profile into exponential and non-exponential parts yields an efficient qualitative and quantitative description of the anomalous skin effect in both inductively and capacitively coupled plasma." @default.
- W2602407917 created "2017-04-07" @default.
- W2602407917 creator A5020903420 @default.
- W2602407917 creator A5045153804 @default.
- W2602407917 creator A5082402854 @default.
- W2602407917 date "2005-06-24" @default.
- W2602407917 modified "2023-09-23" @default.
- W2602407917 title "Revisiting the Anomalous rf Field Penetration into a Warm Plasma" @default.
- W2602407917 doi "https://doi.org/10.2172/841198" @default.
- W2602407917 hasPublicationYear "2005" @default.
- W2602407917 type Work @default.
- W2602407917 sameAs 2602407917 @default.
- W2602407917 citedByCount "0" @default.
- W2602407917 crossrefType "report" @default.
- W2602407917 hasAuthorship W2602407917A5020903420 @default.
- W2602407917 hasAuthorship W2602407917A5045153804 @default.
- W2602407917 hasAuthorship W2602407917A5082402854 @default.
- W2602407917 hasBestOaLocation W26024079172 @default.
- W2602407917 hasConcept C120665830 @default.
- W2602407917 hasConcept C121332964 @default.
- W2602407917 hasConcept C127413603 @default.
- W2602407917 hasConcept C147120987 @default.
- W2602407917 hasConcept C151482245 @default.
- W2602407917 hasConcept C184779094 @default.
- W2602407917 hasConcept C185057767 @default.
- W2602407917 hasConcept C192304548 @default.
- W2602407917 hasConcept C193493375 @default.
- W2602407917 hasConcept C42475967 @default.
- W2602407917 hasConcept C60799052 @default.
- W2602407917 hasConcept C62520636 @default.
- W2602407917 hasConcept C68687820 @default.
- W2602407917 hasConcept C80107235 @default.
- W2602407917 hasConcept C82706917 @default.
- W2602407917 hasConcept C95974651 @default.
- W2602407917 hasConceptScore W2602407917C120665830 @default.
- W2602407917 hasConceptScore W2602407917C121332964 @default.
- W2602407917 hasConceptScore W2602407917C127413603 @default.
- W2602407917 hasConceptScore W2602407917C147120987 @default.
- W2602407917 hasConceptScore W2602407917C151482245 @default.
- W2602407917 hasConceptScore W2602407917C184779094 @default.
- W2602407917 hasConceptScore W2602407917C185057767 @default.
- W2602407917 hasConceptScore W2602407917C192304548 @default.
- W2602407917 hasConceptScore W2602407917C193493375 @default.
- W2602407917 hasConceptScore W2602407917C42475967 @default.
- W2602407917 hasConceptScore W2602407917C60799052 @default.
- W2602407917 hasConceptScore W2602407917C62520636 @default.
- W2602407917 hasConceptScore W2602407917C68687820 @default.
- W2602407917 hasConceptScore W2602407917C80107235 @default.
- W2602407917 hasConceptScore W2602407917C82706917 @default.
- W2602407917 hasConceptScore W2602407917C95974651 @default.
- W2602407917 hasLocation W26024079171 @default.
- W2602407917 hasLocation W26024079172 @default.
- W2602407917 hasLocation W26024079173 @default.
- W2602407917 hasOpenAccess W2602407917 @default.
- W2602407917 hasPrimaryLocation W26024079171 @default.
- W2602407917 hasRelatedWork W1981646342 @default.
- W2602407917 hasRelatedWork W2014146720 @default.
- W2602407917 hasRelatedWork W2027273670 @default.
- W2602407917 hasRelatedWork W2038379700 @default.
- W2602407917 hasRelatedWork W2166450331 @default.
- W2602407917 hasRelatedWork W2168154052 @default.
- W2602407917 hasRelatedWork W2602407917 @default.
- W2602407917 hasRelatedWork W2616711465 @default.
- W2602407917 hasRelatedWork W2782026098 @default.
- W2602407917 hasRelatedWork W3100759817 @default.
- W2602407917 isParatext "false" @default.
- W2602407917 isRetracted "false" @default.
- W2602407917 magId "2602407917" @default.
- W2602407917 workType "report" @default.