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• W2604669805 endingPage "2305" @default.
• W2604669805 startingPage "2298" @default.
• W2604669805 abstract "In this paper, we investigate Low Pressure Chemical Vapor Deposition (LPCVD) SiN as a gate isolation material for AlGaN/gallium nitride (GaN) MIS-high electron mobility transistor power transistors. We compared the dielectric failure by forward-biased constant-current stress time-dependent dielectric breakdown measurements and statistical Weibull analysis. Several 4 AlGaN/GaN-on-Si wafers have been processed with different gate isolations and processes. Our investigation includes the dependence of the dielectric breakdown on the process flow (influence of dry etch), the thickness of the dielectric (12-20 nm), the area scaling, and the gate electrode, where we also consider the recently presented poly-silicon electrode. Additionally, we show the influence of the current density through the gate on the charge-to-breakdown characteristics as well as the influence of the temperature on the breakdown behavior. Using the polysilicon electrode and 20 nm LPCVD SiN as gate isolation, we achieved a charge-to-breakdown of QBD, 10 mA/cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> = 3.7 kC/cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> at T = 130°C for j = 10 mA/cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> . A 20-years lifetime (100 ppm, T = 130°C) extrapolation for a scaled area of 0.2 mm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> (=WG = 100 mm) leads to a positive gate voltage of VG = 9.4 V." @default.
• W2604669805 created "2017-04-14" @default.
• W2604669805 creator A5031355089 @default.
• W2604669805 creator A5032007228 @default.
• W2604669805 creator A5040501215 @default.
• W2604669805 creator A5051777540 @default.
• W2604669805 creator A5075120229 @default.
• W2604669805 creator A5091083409 @default.
• W2604669805 date "2017-05-01" @default.
• W2604669805 modified "2023-09-27" @default.
• W2604669805 title "Reliability Analysis of LPCVD SiN Gate Dielectric for AlGaN/GaN MIS-HEMTs" @default.
• W2604669805 cites W1573335264 @default.
• W2604669805 cites W1964511976 @default.
• W2604669805 cites W1972879459 @default.
• W2604669805 cites W1985162339 @default.
• W2604669805 cites W2002809092 @default.
• W2604669805 cites W2012649733 @default.
• W2604669805 cites W2015001842 @default.
• W2604669805 cites W2059074447 @default.
• W2604669805 cites W2098019598 @default.
• W2604669805 cites W2113488710 @default.
• W2604669805 cites W2122510259 @default.
• W2604669805 cites W2141966815 @default.
• W2604669805 cites W2157685447 @default.
• W2604669805 cites W2209714492 @default.
• W2604669805 cites W2241302494 @default.
• W2604669805 cites W2494997413 @default.
• W2604669805 cites W2496380583 @default.
• W2604669805 cites W2526036753 @default.
• W2604669805 cites W2527653270 @default.
• W2604669805 cites W4240463847 @default.
• W2604669805 doi "https://doi.org/10.1109/ted.2017.2682931" @default.
• W2604669805 hasPublicationYear "2017" @default.
• W2604669805 type Work @default.
• W2604669805 sameAs 2604669805 @default.
• W2604669805 citedByCount "26" @default.
• W2604669805 countsByYear W26046698052017 @default.
• W2604669805 countsByYear W26046698052018 @default.
• W2604669805 countsByYear W26046698052019 @default.
• W2604669805 countsByYear W26046698052020 @default.
• W2604669805 countsByYear W26046698052022 @default.
• W2604669805 countsByYear W26046698052023 @default.
• W2604669805 crossrefType "journal-article" @default.
• W2604669805 hasAuthorship W2604669805A5031355089 @default.
• W2604669805 hasAuthorship W2604669805A5032007228 @default.
• W2604669805 hasAuthorship W2604669805A5040501215 @default.
• W2604669805 hasAuthorship W2604669805A5051777540 @default.
• W2604669805 hasAuthorship W2604669805A5075120229 @default.
• W2604669805 hasAuthorship W2604669805A5091083409 @default.
• W2604669805 hasConcept C110738630 @default.
• W2604669805 hasConcept C113196181 @default.
• W2604669805 hasConcept C119599485 @default.
• W2604669805 hasConcept C127413603 @default.
• W2604669805 hasConcept C133386390 @default.
• W2604669805 hasConcept C147789679 @default.
• W2604669805 hasConcept C152909973 @default.
• W2604669805 hasConcept C165801399 @default.
• W2604669805 hasConcept C166972891 @default.
• W2604669805 hasConcept C171250308 @default.
• W2604669805 hasConcept C172385210 @default.
• W2604669805 hasConcept C17525397 @default.
• W2604669805 hasConcept C175665537 @default.
• W2604669805 hasConcept C185592680 @default.
• W2604669805 hasConcept C192562407 @default.
• W2604669805 hasConcept C2361726 @default.
• W2604669805 hasConcept C2778871202 @default.
• W2604669805 hasConcept C2779227376 @default.
• W2604669805 hasConcept C43617362 @default.
• W2604669805 hasConcept C49040817 @default.
• W2604669805 hasConcept C51140833 @default.
• W2604669805 hasConcept C57410435 @default.
• W2604669805 hasConcept C70401718 @default.
• W2604669805 hasConceptScore W2604669805C110738630 @default.
• W2604669805 hasConceptScore W2604669805C113196181 @default.
• W2604669805 hasConceptScore W2604669805C119599485 @default.
• W2604669805 hasConceptScore W2604669805C127413603 @default.
• W2604669805 hasConceptScore W2604669805C133386390 @default.
• W2604669805 hasConceptScore W2604669805C147789679 @default.
• W2604669805 hasConceptScore W2604669805C152909973 @default.
• W2604669805 hasConceptScore W2604669805C165801399 @default.
• W2604669805 hasConceptScore W2604669805C166972891 @default.
• W2604669805 hasConceptScore W2604669805C171250308 @default.
• W2604669805 hasConceptScore W2604669805C172385210 @default.
• W2604669805 hasConceptScore W2604669805C17525397 @default.
• W2604669805 hasConceptScore W2604669805C175665537 @default.
• W2604669805 hasConceptScore W2604669805C185592680 @default.
• W2604669805 hasConceptScore W2604669805C192562407 @default.
• W2604669805 hasConceptScore W2604669805C2361726 @default.
• W2604669805 hasConceptScore W2604669805C2778871202 @default.
• W2604669805 hasConceptScore W2604669805C2779227376 @default.
• W2604669805 hasConceptScore W2604669805C43617362 @default.
• W2604669805 hasConceptScore W2604669805C49040817 @default.
• W2604669805 hasConceptScore W2604669805C51140833 @default.
• W2604669805 hasConceptScore W2604669805C57410435 @default.
• W2604669805 hasConceptScore W2604669805C70401718 @default.
• W2604669805 hasIssue "5" @default.
• W2604669805 hasLocation W26046698051 @default.
• W2604669805 hasOpenAccess W2604669805 @default.

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