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- W2605453755 abstract "• A hybrid solution for nonlinear dynamics of microcantilevers has been introduced. • The pure odd-order nonlinear model combined with a distributed parameter system. • A comprehensive model for MEMS before, during and after switching was presented. • Two distinct model for before pull-in and after pull-in regimes are combined. This paper introduces a closed-form approximation of dynamic response of microcantilevers. The applied load on the system was linearized by Taylor series expansion and to obtain approximate solutions, model of a pure odd-order nonlinear oscillator, subjected to constant excitation was assumed. Pull-in voltage was investigated to analyze the different parameters of the examined microbeam. In order to obtain a comprehensive dynamic model for MEMS devices, before, during and after switching, the pure odd-order nonlinear model was combined with a distributed parameter system and solved after reaching the pull-in voltage. The obtained results demonstrate correct prediction of the static pull-in voltage and also the dynamic deflection of microbeams. By using the same approach, the sensitivity of the pull-in voltage to various geometrical parameters was also investigated. The obtained results indicate that excessive increase in the air gap causes substantial increase in the pull-in voltage; while increasing thickness of microcantilever has even greater effect. It was also observed that for a given thickness of microcantilever, increasing its length beyond a certain amount has no effect on the pull-in voltage." @default.
- W2605453755 created "2017-04-28" @default.
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- W2605453755 date "2017-08-01" @default.
- W2605453755 modified "2023-09-26" @default.
- W2605453755 title "A hybrid solution for analyzing nonlinear dynamics of electrostatically-actuated microcantilevers" @default.
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- W2605453755 doi "https://doi.org/10.1016/j.apm.2017.04.017" @default.
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