Matches in SemOpenAlex for { <https://semopenalex.org/work/W2605498314> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W2605498314 abstract "A novel method of determination of electron temperature andelectron density in plasma based on optical emissionspectroscopy and collisional-radiative modelling was comparedwith Langmuir probe measurement and PIC/MC simulation. AnRF(13.56 MHz) capacitively-coupled discharge in neon at 10 Pawas investigated by intensity-calibrated optical emissionspectroscopy. The intensities of neon transitions between 3s-3pstates were fitted with CR model to determine the electrontemperature and density. Metastable density measured inabsorption was used in the calculations. A good agreementbetween electron temperature measured by OES+CR method andPIC/MC simulation was obtained close to driven electrode. Thedecrease of the electron temperature going into the bulkplasma, as expected from PIC/MC simulation, was not observed inexperiment. Electron density determined from the fit ofabsolute intensities was found to be 5$times$ larger than theresult of Langmuir probe measurement. The axial dependencies ofelectron density determined by OES+CR and Langmuir probe werevery similar." @default.
- W2605498314 created "2017-04-28" @default.
- W2605498314 creator A5005326669 @default.
- W2605498314 creator A5021424599 @default.
- W2605498314 creator A5050275544 @default.
- W2605498314 creator A5052000424 @default.
- W2605498314 date "2010-10-05" @default.
- W2605498314 modified "2023-09-27" @default.
- W2605498314 title "Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling" @default.
- W2605498314 hasPublicationYear "2010" @default.
- W2605498314 type Work @default.
- W2605498314 sameAs 2605498314 @default.
- W2605498314 citedByCount "0" @default.
- W2605498314 crossrefType "journal-article" @default.
- W2605498314 hasAuthorship W2605498314A5005326669 @default.
- W2605498314 hasAuthorship W2605498314A5021424599 @default.
- W2605498314 hasAuthorship W2605498314A5050275544 @default.
- W2605498314 hasAuthorship W2605498314A5052000424 @default.
- W2605498314 hasConcept C113196181 @default.
- W2605498314 hasConcept C121332964 @default.
- W2605498314 hasConcept C125485243 @default.
- W2605498314 hasConcept C176118016 @default.
- W2605498314 hasConcept C184779094 @default.
- W2605498314 hasConcept C185592680 @default.
- W2605498314 hasConcept C192562407 @default.
- W2605498314 hasConcept C22175881 @default.
- W2605498314 hasConcept C32891209 @default.
- W2605498314 hasConcept C43503373 @default.
- W2605498314 hasConcept C43617362 @default.
- W2605498314 hasConcept C522602180 @default.
- W2605498314 hasConcept C547737533 @default.
- W2605498314 hasConcept C62520636 @default.
- W2605498314 hasConcept C82706917 @default.
- W2605498314 hasConceptScore W2605498314C113196181 @default.
- W2605498314 hasConceptScore W2605498314C121332964 @default.
- W2605498314 hasConceptScore W2605498314C125485243 @default.
- W2605498314 hasConceptScore W2605498314C176118016 @default.
- W2605498314 hasConceptScore W2605498314C184779094 @default.
- W2605498314 hasConceptScore W2605498314C185592680 @default.
- W2605498314 hasConceptScore W2605498314C192562407 @default.
- W2605498314 hasConceptScore W2605498314C22175881 @default.
- W2605498314 hasConceptScore W2605498314C32891209 @default.
- W2605498314 hasConceptScore W2605498314C43503373 @default.
- W2605498314 hasConceptScore W2605498314C43617362 @default.
- W2605498314 hasConceptScore W2605498314C522602180 @default.
- W2605498314 hasConceptScore W2605498314C547737533 @default.
- W2605498314 hasConceptScore W2605498314C62520636 @default.
- W2605498314 hasConceptScore W2605498314C82706917 @default.
- W2605498314 hasLocation W26054983141 @default.
- W2605498314 hasOpenAccess W2605498314 @default.
- W2605498314 hasPrimaryLocation W26054983141 @default.
- W2605498314 hasRelatedWork W1791479894 @default.
- W2605498314 hasRelatedWork W1976157361 @default.
- W2605498314 hasRelatedWork W1985654890 @default.
- W2605498314 hasRelatedWork W2020637280 @default.
- W2605498314 hasRelatedWork W2021745150 @default.
- W2605498314 hasRelatedWork W2031280560 @default.
- W2605498314 hasRelatedWork W2050566627 @default.
- W2605498314 hasRelatedWork W2090549776 @default.
- W2605498314 hasRelatedWork W2200625217 @default.
- W2605498314 hasRelatedWork W2613478092 @default.
- W2605498314 hasRelatedWork W2613539665 @default.
- W2605498314 hasRelatedWork W2621013451 @default.
- W2605498314 hasRelatedWork W2623361520 @default.
- W2605498314 hasRelatedWork W2735965019 @default.
- W2605498314 hasRelatedWork W2737431924 @default.
- W2605498314 hasRelatedWork W2755030565 @default.
- W2605498314 hasRelatedWork W2903223216 @default.
- W2605498314 hasRelatedWork W2966664574 @default.
- W2605498314 hasRelatedWork W3084827490 @default.
- W2605498314 hasRelatedWork W3187156960 @default.
- W2605498314 isParatext "false" @default.
- W2605498314 isRetracted "false" @default.
- W2605498314 magId "2605498314" @default.
- W2605498314 workType "article" @default.