Matches in SemOpenAlex for { <https://semopenalex.org/work/W2605595697> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2605595697 abstract "Test structures were developed to visualize the progress of the dry release of an MEMS device fabricated by deep reactive ion etching (DRIE). Because of the high aspect ratio of DRIE MEMS devices, the undercut progress cannot be observed from the surface. Therefore, a destructive test, i.e., a cross-sectional-view observation of a cleaved sample, has mostly been employed. Using the proposed test structure, the progress of the silicon undercutting can be evaluated in a nondestructive manner, using only an optical microscope. The test structure was not only found to be useful in optimizing the release etching procedure, but also allows us to discover a particular DRIE mode that is useful for dry release. Indeed, most DRIE process engineers have considered and mainly tuned the etching phase; using the test structures, we found that the deposition phase of DRIE can be strategically used to further increase the undercutting speed. The new mode, referred to as the “undercut directional etching mode,” intentionally leaves a fluorocarbon layer for protection of the side-wall, at the bottom center of the trench openings. Because of the deposition layer remaining at the bottom center, the introduced plasma species are concentrated towards the edge of the trench, i.e., at the foot of silicon structure to be released, thereby enhancing the undercut etching. A second test structure identified the appearance of the new mode and visualized the dependence of the etching behavior on the trench opening width. The optimized etching conditions determined using the test structures led to the successful release of a standard in-plane MEMS device." @default.
- W2605595697 created "2017-04-28" @default.
- W2605595697 creator A5025368684 @default.
- W2605595697 creator A5038609514 @default.
- W2605595697 creator A5046116812 @default.
- W2605595697 creator A5047216234 @default.
- W2605595697 creator A5083504396 @default.
- W2605595697 date "2017-08-01" @default.
- W2605595697 modified "2023-10-02" @default.
- W2605595697 title "Test Structures for End-Point Visualization of All-Plasma Dry Release of Deep-RIE MEMS Devices and Application to Release Process Modal Analysis" @default.
- W2605595697 cites W1561298264 @default.
- W2605595697 cites W1994364316 @default.
- W2605595697 cites W2009873478 @default.
- W2605595697 cites W2020628198 @default.
- W2605595697 cites W2108908388 @default.
- W2605595697 cites W2112535567 @default.
- W2605595697 cites W2121275838 @default.
- W2605595697 cites W2143653641 @default.
- W2605595697 cites W2162869577 @default.
- W2605595697 cites W2168756522 @default.
- W2605595697 cites W2289781667 @default.
- W2605595697 cites W2316055993 @default.
- W2605595697 cites W2403475928 @default.
- W2605595697 doi "https://doi.org/10.1109/tsm.2017.2694845" @default.
- W2605595697 hasPublicationYear "2017" @default.
- W2605595697 type Work @default.
- W2605595697 sameAs 2605595697 @default.
- W2605595697 citedByCount "2" @default.
- W2605595697 countsByYear W26055956972021 @default.
- W2605595697 countsByYear W26055956972023 @default.
- W2605595697 crossrefType "journal-article" @default.
- W2605595697 hasAuthorship W2605595697A5025368684 @default.
- W2605595697 hasAuthorship W2605595697A5038609514 @default.
- W2605595697 hasAuthorship W2605595697A5046116812 @default.
- W2605595697 hasAuthorship W2605595697A5047216234 @default.
- W2605595697 hasAuthorship W2605595697A5083504396 @default.
- W2605595697 hasConcept C100460472 @default.
- W2605595697 hasConcept C124634506 @default.
- W2605595697 hasConcept C1291036 @default.
- W2605595697 hasConcept C130472188 @default.
- W2605595697 hasConcept C155310634 @default.
- W2605595697 hasConcept C159985019 @default.
- W2605595697 hasConcept C171250308 @default.
- W2605595697 hasConcept C192562407 @default.
- W2605595697 hasConcept C2779227376 @default.
- W2605595697 hasConcept C2779292183 @default.
- W2605595697 hasConcept C37977207 @default.
- W2605595697 hasConcept C49040817 @default.
- W2605595697 hasConcept C544956773 @default.
- W2605595697 hasConceptScore W2605595697C100460472 @default.
- W2605595697 hasConceptScore W2605595697C124634506 @default.
- W2605595697 hasConceptScore W2605595697C1291036 @default.
- W2605595697 hasConceptScore W2605595697C130472188 @default.
- W2605595697 hasConceptScore W2605595697C155310634 @default.
- W2605595697 hasConceptScore W2605595697C159985019 @default.
- W2605595697 hasConceptScore W2605595697C171250308 @default.
- W2605595697 hasConceptScore W2605595697C192562407 @default.
- W2605595697 hasConceptScore W2605595697C2779227376 @default.
- W2605595697 hasConceptScore W2605595697C2779292183 @default.
- W2605595697 hasConceptScore W2605595697C37977207 @default.
- W2605595697 hasConceptScore W2605595697C49040817 @default.
- W2605595697 hasConceptScore W2605595697C544956773 @default.
- W2605595697 hasFunder F4320334764 @default.
- W2605595697 hasLocation W26055956971 @default.
- W2605595697 hasOpenAccess W2605595697 @default.
- W2605595697 hasPrimaryLocation W26055956971 @default.
- W2605595697 hasRelatedWork W189113030 @default.
- W2605595697 hasRelatedWork W2081481059 @default.
- W2605595697 hasRelatedWork W2183600952 @default.
- W2605595697 hasRelatedWork W2236314072 @default.
- W2605595697 hasRelatedWork W2599227994 @default.
- W2605595697 hasRelatedWork W2718942902 @default.
- W2605595697 hasRelatedWork W2798386134 @default.
- W2605595697 hasRelatedWork W2948451925 @default.
- W2605595697 hasRelatedWork W2982045734 @default.
- W2605595697 hasRelatedWork W3094407298 @default.
- W2605595697 hasRelatedWork W3174566788 @default.
- W2605595697 hasRelatedWork W82366516 @default.
- W2605595697 hasRelatedWork W1529037064 @default.
- W2605595697 hasRelatedWork W1923993930 @default.
- W2605595697 hasRelatedWork W2204960254 @default.
- W2605595697 hasRelatedWork W2773377433 @default.
- W2605595697 hasRelatedWork W2809975956 @default.
- W2605595697 isParatext "false" @default.
- W2605595697 isRetracted "false" @default.
- W2605595697 magId "2605595697" @default.
- W2605595697 workType "article" @default.