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- W2605645894 abstract "The aim of this paper is to study the temporal evolutions of sputtered species number densities during a preceding (P) and a subsequent (S) pulse in a multi-pulse HiPIMS. The Ti atom number density does not reach the maximum at the time of the maximal discharge current. It is shown that the residual particles from the P pulse are presented at the beginning of the S pulse even for the longest studied delay between the P and the S pulse. The ionization fractions of sputtered species attained at the end of the S pulses are always lower compared to the P pulse. The coatings produced by multi-pulse HiPIMS exhibited decreased roughness and increased hardness in comparison with standard HiPIMS and DC magnetron sputtered coating." @default.
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- W2605645894 date "2018-04-01" @default.
- W2605645894 modified "2023-09-23" @default.
- W2605645894 title "Temporal Evolution of Ti Sputtered Species Number Densities in a Multi-pulse HiPIMS Process" @default.
- W2605645894 doi "https://doi.org/10.14332/svc17.proc.42763" @default.
- W2605645894 hasPublicationYear "2018" @default.
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