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• W2605851866 abstract "Bio-implantable medical devices need a reliable and stable source of power to perform effectively. Although batteries canbe the first candidate to power implantable devices as they provide high energy density, they cannot supply power for longperiods of time and therefore, they must be periodically replaced or recharged. Battery replacement is particularly difficultas it requires surgery. In this paper, we develop a micromachined ultrasonic power generating receiver with a size of3.5mmx3.5mm capable of providing sufficient power for implantable medical devices. The ultrasound receiver takes theform of a unimorph diaphragm consisting of PZT on silicon. We dice bulk PZT with a thickness of 127 μm and bond thediced pieces to a silicon wafer. In order to get a 50 μm thick PZT layer, which is needed for optimal power transfer, wemechanically lap and polish the bonded PZT. We numerically investigate the performance of the fabricated receiver withinner and outer electrodes on the surface of the PZT. Using COMSOL simulations, we analyze the effect of different sizesof inner and outer electrodes under the actuation of the inner electrode in order to find the optimum electrode sizes. Weshow that when the transmitter is generating an input power less than Food and Drug Administration limits, the receivercan provide sufficient voltage and power for many implantable devices. Furthermore, the process developed can be usedto fabricate significantly smaller devices than the one characterized, which enables further miniaturization of bio-implantedsystems." @default.
• W2605851866 created "2017-04-28" @default.
• W2605851866 creator A5040308887 @default.
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• W2605851866 date "2017-04-11" @default.
• W2605851866 modified "2023-09-23" @default.
• W2605851866 title "A micromachined ultrasonic power receiver for biomedical implants" @default.
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• W2605851866 doi "https://doi.org/10.1117/12.2260059" @default.
• W2605851866 hasPublicationYear "2017" @default.
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