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- W2609849118 abstract "Oblique-incidence spectrophotometric measurements are considered for reliable determination of the refractive index and thickness of thin-film coatings. By using a model of the spectral transmittance of thin film samples, the effect of systematic factors on the determined thin-film parameters is analyzed. The optical parameters of a silicon-dioxide sample determined from the experimental results obtained with the HUT spectrophotometer are consistent for the incidence angles between 0 and 56.4 degrees, demonstrating high accuracy of film-parameter determination." @default.
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- W2609849118 date "2003-01-01" @default.
- W2609849118 modified "2023-09-27" @default.
- W2609849118 title "Optical metrology of thin films using high-accuracy spectrophotometric measurements with oblique angles of incidence" @default.
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