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- W2610353227 abstract "The issue of this document is to improve the metrological performances of XY translation stages of an optical profilometer Altisurf©. We propose a calibration protocol to correct the systematic geometrical errors, for example pitch and roll, related to geometrical errors of guiding system. It consists in measuring a flat glass with λ/10 (flatness ≈ 60 nm) and a very high precision optical sensor (u=0.06 μm). The correction surface is then parameterized by an original method of parameterization: the modal parameterization, to differentiate the systematic and random geometrical errors. The modal parameterization of a surface results from the Discrete Modal Decomposition (DMD) of the measured surface. The DMD consists in decomposing this measurement to a basis of basic errors, derived from vibratory mechanics. Resume : L'objectif de cet article est d'ameliorer les performances metrologiques d'un montage XY de micro-positionnement d'un profilometre optique Altisurf©. Nous proposons un protocole de calibration permettant de corriger les variations geometriques systematiques, par exemple de tangage et de roulis, liees au systeme de guidage. Il s'agit de mesurer un plan de verre de planeite tres faible (λ/10, planeite ≈ 60 nm) avec un capteur optique de tres grande precision (u=0.06 μm). La surface de correction est ensuite parametree par une methode de parametrage original : le parametrage modal, permettant ainsi de n'extraire que les variations geometriques repetables. Le parametrage modal d'une surface resulte de la Decomposition Modale Discrete (DMD) de la mesure de la surface. La DMD consiste a decomposer cette mesure dans un ensemble de defauts elementaires, derivant de la mecanique vibratoire." @default.
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- W2610353227 date "2011-10-03" @default.
- W2610353227 modified "2023-10-17" @default.
- W2610353227 title "Flatness calibration of XY translation stages through modal parameterization" @default.
- W2610353227 hasPublicationYear "2011" @default.
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