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- W2610374827 abstract "Titanium nitride and aluminum nitride coatings have been deposited on glass and aluminum oxide substrates in a flow of metal atoms accompanied by high-energy gas atoms. The metal atoms are produced due to sputtering of a flat rectangular magnetron target. The gas atoms with energy up to 25 keV are produced due to charge exchange collisions of ions extracted from the magnetron discharge plasma and accelerated by high-voltage pulses applied to a flat grid parallel to the target. The metal atoms pass through the grid and deposit on the substrate. Conjunction of their trajectories with those of gas atoms bombarding the growing coating enables the coating synthesis on complex-shape dielectric products planetary rotating inside the vacuum chamber. Mixing high-energy gas atoms of the coating and substrate atoms substantially improves the coating adhesion." @default.
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- W2610374827 date "2017-05-04" @default.
- W2610374827 modified "2023-09-25" @default.
- W2610374827 title "Coating synthesis on dielectric substrates assisted by pulsed beams of high-energy gas atoms" @default.
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- W2610374827 doi "https://doi.org/10.1088/1742-6596/830/1/012098" @default.
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