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- W2610459968 abstract "The paper presents research results on the capabilities of an unbalanced magnetron sputtering (UMS) system with a coefficient of geometrical unbalance KG=0.3 to produce gas discharge plasma far from its target. Using argon as the working gas and silicon as the target material, it is shown that the proposed UMS system provides the generation of plasma with an ion current density of ≈ 0.2 mA/cm2 in the region of treated material at 440 mm from the Si target. The research data on the maximum power at which the UMS system produces high-density plasma without melting the Si target are also presented." @default.
- W2610459968 created "2017-05-12" @default.
- W2610459968 creator A5007789298 @default.
- W2610459968 creator A5011289700 @default.
- W2610459968 creator A5071850938 @default.
- W2610459968 date "2017-05-04" @default.
- W2610459968 modified "2023-10-17" @default.
- W2610459968 title "Plasma source based on an unbalanced magnetron sputtering system" @default.
- W2610459968 cites W1643625480 @default.
- W2610459968 cites W2042414791 @default.
- W2610459968 cites W2045459744 @default.
- W2610459968 cites W2057960178 @default.
- W2610459968 cites W2077354020 @default.
- W2610459968 cites W2087850532 @default.
- W2610459968 cites W2093247190 @default.
- W2610459968 cites W2093522824 @default.
- W2610459968 doi "https://doi.org/10.1088/1742-6596/830/1/012057" @default.
- W2610459968 hasPublicationYear "2017" @default.
- W2610459968 type Work @default.
- W2610459968 sameAs 2610459968 @default.
- W2610459968 citedByCount "1" @default.
- W2610459968 countsByYear W26104599682020 @default.
- W2610459968 crossrefType "journal-article" @default.
- W2610459968 hasAuthorship W2610459968A5007789298 @default.
- W2610459968 hasAuthorship W2610459968A5011289700 @default.
- W2610459968 hasAuthorship W2610459968A5071850938 @default.
- W2610459968 hasBestOaLocation W26104599681 @default.
- W2610459968 hasConcept C116915560 @default.
- W2610459968 hasConcept C121332964 @default.
- W2610459968 hasConcept C123408415 @default.
- W2610459968 hasConcept C127413603 @default.
- W2610459968 hasConcept C145148216 @default.
- W2610459968 hasConcept C171250308 @default.
- W2610459968 hasConcept C178790620 @default.
- W2610459968 hasConcept C184779094 @default.
- W2610459968 hasConcept C185544564 @default.
- W2610459968 hasConcept C185592680 @default.
- W2610459968 hasConcept C19067145 @default.
- W2610459968 hasConcept C192562407 @default.
- W2610459968 hasConcept C22423302 @default.
- W2610459968 hasConcept C49040817 @default.
- W2610459968 hasConcept C544956773 @default.
- W2610459968 hasConcept C547737533 @default.
- W2610459968 hasConcept C61427134 @default.
- W2610459968 hasConcept C82706917 @default.
- W2610459968 hasConceptScore W2610459968C116915560 @default.
- W2610459968 hasConceptScore W2610459968C121332964 @default.
- W2610459968 hasConceptScore W2610459968C123408415 @default.
- W2610459968 hasConceptScore W2610459968C127413603 @default.
- W2610459968 hasConceptScore W2610459968C145148216 @default.
- W2610459968 hasConceptScore W2610459968C171250308 @default.
- W2610459968 hasConceptScore W2610459968C178790620 @default.
- W2610459968 hasConceptScore W2610459968C184779094 @default.
- W2610459968 hasConceptScore W2610459968C185544564 @default.
- W2610459968 hasConceptScore W2610459968C185592680 @default.
- W2610459968 hasConceptScore W2610459968C19067145 @default.
- W2610459968 hasConceptScore W2610459968C192562407 @default.
- W2610459968 hasConceptScore W2610459968C22423302 @default.
- W2610459968 hasConceptScore W2610459968C49040817 @default.
- W2610459968 hasConceptScore W2610459968C544956773 @default.
- W2610459968 hasConceptScore W2610459968C547737533 @default.
- W2610459968 hasConceptScore W2610459968C61427134 @default.
- W2610459968 hasConceptScore W2610459968C82706917 @default.
- W2610459968 hasLocation W26104599681 @default.
- W2610459968 hasOpenAccess W2610459968 @default.
- W2610459968 hasPrimaryLocation W26104599681 @default.
- W2610459968 hasRelatedWork W192837310 @default.
- W2610459968 hasRelatedWork W1989622559 @default.
- W2610459968 hasRelatedWork W1990905515 @default.
- W2610459968 hasRelatedWork W2002701515 @default.
- W2610459968 hasRelatedWork W2004691564 @default.
- W2610459968 hasRelatedWork W2071503497 @default.
- W2610459968 hasRelatedWork W2079686829 @default.
- W2610459968 hasRelatedWork W2079975564 @default.
- W2610459968 hasRelatedWork W2092585016 @default.
- W2610459968 hasRelatedWork W2379753516 @default.
- W2610459968 hasRelatedWork W2392756851 @default.
- W2610459968 hasRelatedWork W1517540346 @default.
- W2610459968 hasRelatedWork W2780550850 @default.
- W2610459968 hasRelatedWork W2817218640 @default.
- W2610459968 hasRelatedWork W2820047385 @default.
- W2610459968 hasRelatedWork W2859565911 @default.
- W2610459968 hasRelatedWork W2864456424 @default.
- W2610459968 hasRelatedWork W2872620292 @default.
- W2610459968 hasRelatedWork W2933247600 @default.
- W2610459968 hasRelatedWork W3145507554 @default.
- W2610459968 isParatext "false" @default.
- W2610459968 isRetracted "false" @default.
- W2610459968 magId "2610459968" @default.
- W2610459968 workType "article" @default.