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- W2610797918 abstract "Higher harmonic frequencies of discharge voltage or currentwere analyzed and used for monitoring of various depositiontechniques. It was shown that higher harmonics sensitivelyreact on creation of a thin film, which can be used for simplemonitoring of plasma processes." @default.
- W2610797918 created "2017-05-12" @default.
- W2610797918 creator A5004080533 @default.
- W2610797918 creator A5052000424 @default.
- W2610797918 creator A5054999590 @default.
- W2610797918 creator A5066118474 @default.
- W2610797918 date "2011-01-01" @default.
- W2610797918 modified "2023-10-17" @default.
- W2610797918 title "Application of higher harmonic frequencies generated in RF plasmas for monitoring of deposition processes" @default.
- W2610797918 hasPublicationYear "2011" @default.
- W2610797918 type Work @default.
- W2610797918 sameAs 2610797918 @default.
- W2610797918 citedByCount "0" @default.
- W2610797918 crossrefType "journal-article" @default.
- W2610797918 hasAuthorship W2610797918A5004080533 @default.
- W2610797918 hasAuthorship W2610797918A5052000424 @default.
- W2610797918 hasAuthorship W2610797918A5054999590 @default.
- W2610797918 hasAuthorship W2610797918A5066118474 @default.
- W2610797918 hasConcept C113196181 @default.
- W2610797918 hasConcept C119599485 @default.
- W2610797918 hasConcept C121332964 @default.
- W2610797918 hasConcept C127413603 @default.
- W2610797918 hasConcept C127934551 @default.
- W2610797918 hasConcept C151730666 @default.
- W2610797918 hasConcept C165801399 @default.
- W2610797918 hasConcept C185544564 @default.
- W2610797918 hasConcept C185592680 @default.
- W2610797918 hasConcept C188414643 @default.
- W2610797918 hasConcept C192562407 @default.
- W2610797918 hasConcept C24890656 @default.
- W2610797918 hasConcept C2816523 @default.
- W2610797918 hasConcept C43617362 @default.
- W2610797918 hasConcept C49040817 @default.
- W2610797918 hasConcept C64297162 @default.
- W2610797918 hasConcept C82706917 @default.
- W2610797918 hasConcept C86803240 @default.
- W2610797918 hasConceptScore W2610797918C113196181 @default.
- W2610797918 hasConceptScore W2610797918C119599485 @default.
- W2610797918 hasConceptScore W2610797918C121332964 @default.
- W2610797918 hasConceptScore W2610797918C127413603 @default.
- W2610797918 hasConceptScore W2610797918C127934551 @default.
- W2610797918 hasConceptScore W2610797918C151730666 @default.
- W2610797918 hasConceptScore W2610797918C165801399 @default.
- W2610797918 hasConceptScore W2610797918C185544564 @default.
- W2610797918 hasConceptScore W2610797918C185592680 @default.
- W2610797918 hasConceptScore W2610797918C188414643 @default.
- W2610797918 hasConceptScore W2610797918C192562407 @default.
- W2610797918 hasConceptScore W2610797918C24890656 @default.
- W2610797918 hasConceptScore W2610797918C2816523 @default.
- W2610797918 hasConceptScore W2610797918C43617362 @default.
- W2610797918 hasConceptScore W2610797918C49040817 @default.
- W2610797918 hasConceptScore W2610797918C64297162 @default.
- W2610797918 hasConceptScore W2610797918C82706917 @default.
- W2610797918 hasConceptScore W2610797918C86803240 @default.
- W2610797918 hasLocation W26107979181 @default.
- W2610797918 hasOpenAccess W2610797918 @default.
- W2610797918 hasPrimaryLocation W26107979181 @default.
- W2610797918 hasRelatedWork W1497199568 @default.
- W2610797918 hasRelatedWork W1973305293 @default.
- W2610797918 hasRelatedWork W2075420116 @default.
- W2610797918 hasRelatedWork W2101144934 @default.
- W2610797918 hasRelatedWork W2127773269 @default.
- W2610797918 hasRelatedWork W2508869063 @default.
- W2610797918 hasRelatedWork W2605824392 @default.
- W2610797918 hasRelatedWork W2728012210 @default.
- W2610797918 hasRelatedWork W2730010846 @default.
- W2610797918 hasRelatedWork W2738490511 @default.
- W2610797918 hasRelatedWork W2764687456 @default.
- W2610797918 hasRelatedWork W2795601902 @default.
- W2610797918 hasRelatedWork W2963017448 @default.
- W2610797918 hasRelatedWork W2987138169 @default.
- W2610797918 hasRelatedWork W3083572119 @default.
- W2610797918 hasRelatedWork W3105900471 @default.
- W2610797918 hasRelatedWork W3167787350 @default.
- W2610797918 hasRelatedWork W3198443203 @default.
- W2610797918 hasRelatedWork W3212396023 @default.
- W2610797918 hasRelatedWork W613445607 @default.
- W2610797918 isParatext "false" @default.
- W2610797918 isRetracted "false" @default.
- W2610797918 magId "2610797918" @default.
- W2610797918 workType "article" @default.