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- W2611008663 abstract "Second-harmonic generation has proven to be a contactless and noninvasive probe of buried semiconductor/oxide interfaces. It has previously been demonstrated that SHG can be used to monitor interface quality and charge carrier dynamics in UNIBOND® SOI wafers. Here we report results obtained from commercial SOI wafers, made by the SIMOX method, and by a bonding plus layer transfer process. We suggest that characterization using optical second-harmonic generation may be suitable for in situ monitoring of SOI wafer quality." @default.
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- W2611008663 date "2006-02-22" @default.
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- W2611008663 title "Investigation of Second-Harmonic Generation for SOI Wafer Metrology" @default.
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