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- W2611232014 abstract "Polycrystalline titanium was implanted with nitrogen ions at energies from 30 to 60 keV and with doses from 1 x 1016 to 1.5 x 1018N+-ionscm -2at room temperature. The implanted titanium layers were investigated by high-voRage electron microscopy and transmission highenergy electron diffraction. The formation of titanium nitride, titanium carbonitride and titanium carbide phases were considered in relation to their dependence on nitrogen ion implantation dose. In the dose range from 1 x 1016 up to 1.5 x 1018N+_ionscm -2thecubic phase 6-TiNx was formed. In the dose range between 1 to 2.5 x 1017 and 1.5 x 1018 N +_ ions cm -2 the tetragonal phase e-T%N was found in addition to the 5-TiNx phase. The lattice structure of these titanium nitride phases is a function of the nitrogen ion implantation dose. Additionally, the presence of titanium carbonitride TiCyNx and titanium carbide TiCr phases can be proved. The analysed titanium nitride, titanium carbonitride and titanium carbide phases are represented in a state diagram as a function of implantation dose." @default.
- W2611232014 created "2017-05-12" @default.
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- W2611232014 date "1986-01-01" @default.
- W2611232014 modified "2023-09-24" @default.
- W2611232014 title "Formation of compounds by hig ion implantation in titanium h-flux nitrogen" @default.
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