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- W2612464232 abstract "Deposition and analyses of hard and thick well adherentnc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD process.Severeal micrometers thick coatings with hardness over 45 GPaand Young's modulus over 400 GPa was reached." @default.
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- W2612464232 date "2011-09-05" @default.
- W2612464232 modified "2023-10-17" @default.
- W2612464232 title "Deposition and analyses of hard and thick well adherentnc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD process" @default.
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