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- W2613228728 abstract "We used Langmuir probe and Balzers PPM to determine electronconcentration, energy of ions and plasma potential in Ar and N2discharge. Both diagnostic devices were oriented parallel. Themovable electrodes allow a perpendicular spatially resolvedmeasurements. The ion energy distribution (IED) measured at thehigh power is the same as at the grounded electrode. Itexhibited only one peak which was typically found for lowvoltage modulated r.f. sheaths (the case of groundedelectrode). The mean energy of Ar+ and N2+ ions was about 92~%of the energy related to the plasma potential. Moreover, lowenergy electron tail appeared in their IEDs. These both factsare explained by collisions in the sheath. Not observed effectof collisions in N+ ions IEDs. The ion mean energies decreasedtowards the grounded electrodes in agreement with the plasmapotential. The ion and electron concentrations showed similarprofiles (maximum about 12~mm above the grounded electrode)." @default.
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- W2613228728 date "2004-01-01" @default.
- W2613228728 modified "2023-09-23" @default.
- W2613228728 title "Ion and Probe Measurements in rf Capacitive Discharges in Argonand Nitrogen" @default.
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