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- W2614648360 abstract "Off‐axis r.f. planar magnetron sputtering was used to deposit superconducting thin films of YBCO on substrates such as MgO and SrTiO3. The effect of substrate position and sputtering pressure on film stoichiometry was studied. Targets with two different stoichiometries, Y1Ba2Cu3Ox and Y1Ba2Cu4.5Ox were used. Depending on the sputtering pressure and position of substrates, films with stoichiometries ranging from Y1Ba1.8Cu3.3Ox to Y1Ba2.2Cu4.1Ox were obtained from the Y1Ba2Cu4.5Ox target, whereas films sputtered from Y1Ba2Cu3Ox target resulted in Y1Ba2.2Cu2.9Ox film. Film stoichiometries were found to be different for SrTiO3 and MgO when the two substrates were placed side by side in the same experimental run. The films were annealed post deposition in a tube furnace. The effect of process parameters on the structure and morphology of films was studied by x‐ray diffraction and SEM. The x‐ray diffraction pattern shows a high degree of c‐axis orientation perpendicular to the substrate plane. The films anneale..." @default.
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- W2614648360 date "1992-01-01" @default.
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- W2614648360 title "Effect of process parameters on properties of YBCO thin films deposited by off-axis planar magnetron sputtering" @default.
- W2614648360 doi "https://doi.org/10.1063/1.43585" @default.
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