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- W2616234038 abstract "We have realized a three-dimensional (3D) operation of a microelectromechanical systems (MEMS) mirror with three resonant modes and a single driving apparatus by a single superposed signal with three frequencies. We fabricated a 3D MEMS mirror with a single pair of beams having three resonant modes (x- and y-axis rotational modes and a z-axis vertical mode). We demonstrated the 3D operation by a single driving apparatus using the Lorentz force. In addition, we have shown that the x- and y-axis rotational angles and z-axis vertical displacement are proportional to the voltage amplitudes of each resonant frequency in the superposed signal, and the proportionality constants for each angle and deformation are approximately determined as 0.10°/V, 0.10°/V, and 70 nm/V, respectively. This result indicates that the mechanical amplitude of each mode is easy to control by the signal amplitude of each resonant frequency in the superposed signal." @default.
- W2616234038 created "2017-05-26" @default.
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- W2616234038 date "2017-05-18" @default.
- W2616234038 modified "2023-09-26" @default.
- W2616234038 title "Operation of three-dimensional MEMS mirror by single superposed driving signal" @default.
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- W2616234038 doi "https://doi.org/10.7567/jjap.56.06gn12" @default.
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