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• W2616676912 abstract "Silicon samples were implanted with (hbox {Au}^{2+}) ions of energy 100 keV and doses of (10^{14},hbox { cm}^{-2}). The area of the implanted region was (2,hbox {mm}times 2,hbox {mm}). The size of the Si substrate samples was (5,hbox {mm}times 5,hbox {mm}times 0.4,hbox {mm}). Spatial distributions of the amplitude and profiles of the modulated free-carrier absorption (MFCA) signal of the implanted silicon samples were recorded and analyzed. The data were obtained using an experimental setup built specifically for MFCA amplitude mapping and measurements of frequency characteristics. For example, the maps and profiles showed that for 520 nm laser illumination, the MFCA amplitude in the implanted region was considerably smaller than that for the substrate. The values of the amplitude of the MFCA signal from the implanted region depended on the wavelength of illuminating light. They convey information related to the optical absorption coefficient of the implanted layers." @default.
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• W2616676912 date "2017-05-18" @default.
• W2616676912 modified "2023-10-16" @default.
• W2616676912 title "$$hbox {Au}^{2+}$$ Au 2 + -Implanted Regions in Silicon Visualized Using a Modulated Free-Carrier Absorption Method" @default.
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• W2616676912 doi "https://doi.org/10.1007/s10765-017-2246-2" @default.
• W2616676912 hasPublicationYear "2017" @default.
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