Matches in SemOpenAlex for { <https://semopenalex.org/work/W2616831687> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2616831687 endingPage "337" @default.
- W2616831687 startingPage "334" @default.
- W2616831687 abstract "We study the dispersion in the Rsheet measurement.We study the light influence on the Rsheet measurement.We deduce a trapping mechanism in the AlGaN/GaN stack.We simulate the trapping phenomenon. An important dispersion in the Rsheet measurement of AlGaN/GaN wafers was found on different samples, with or without SiN passivation. The dispersion is due to a drift of the Rsheet appearing when the sample is placed in the dark. This drift is different for each sample and it is caused by a trapping mechanism. A constant measurement of the Rsheet can be obtained under illumination. Thus, two parameters deserve measurement for an efficient screening of a technology: Rsheet under light and ΔRsheet in obscurity." @default.
- W2616831687 created "2017-05-26" @default.
- W2616831687 creator A5012155018 @default.
- W2616831687 creator A5020906871 @default.
- W2616831687 creator A5027462179 @default.
- W2616831687 creator A5029342519 @default.
- W2616831687 creator A5035576787 @default.
- W2616831687 creator A5041967838 @default.
- W2616831687 creator A5050674003 @default.
- W2616831687 creator A5065366767 @default.
- W2616831687 creator A5071218155 @default.
- W2616831687 date "2013-09-01" @default.
- W2616831687 modified "2023-10-16" @default.
- W2616831687 title "Sheet resistance measurement on AlGaN/GaN wafers and dispersion study" @default.
- W2616831687 cites W2139228516 @default.
- W2616831687 cites W2157738319 @default.
- W2616831687 cites W4237772584 @default.
- W2616831687 doi "https://doi.org/10.1016/j.mee.2013.03.161" @default.
- W2616831687 hasPublicationYear "2013" @default.
- W2616831687 type Work @default.
- W2616831687 sameAs 2616831687 @default.
- W2616831687 citedByCount "6" @default.
- W2616831687 countsByYear W26168316872015 @default.
- W2616831687 countsByYear W26168316872017 @default.
- W2616831687 countsByYear W26168316872018 @default.
- W2616831687 countsByYear W26168316872019 @default.
- W2616831687 countsByYear W26168316872021 @default.
- W2616831687 crossrefType "journal-article" @default.
- W2616831687 hasAuthorship W2616831687A5012155018 @default.
- W2616831687 hasAuthorship W2616831687A5020906871 @default.
- W2616831687 hasAuthorship W2616831687A5027462179 @default.
- W2616831687 hasAuthorship W2616831687A5029342519 @default.
- W2616831687 hasAuthorship W2616831687A5035576787 @default.
- W2616831687 hasAuthorship W2616831687A5041967838 @default.
- W2616831687 hasAuthorship W2616831687A5050674003 @default.
- W2616831687 hasAuthorship W2616831687A5065366767 @default.
- W2616831687 hasAuthorship W2616831687A5071218155 @default.
- W2616831687 hasConcept C120665830 @default.
- W2616831687 hasConcept C121332964 @default.
- W2616831687 hasConcept C160671074 @default.
- W2616831687 hasConcept C171250308 @default.
- W2616831687 hasConcept C177562468 @default.
- W2616831687 hasConcept C192562407 @default.
- W2616831687 hasConcept C2779227376 @default.
- W2616831687 hasConcept C49040817 @default.
- W2616831687 hasConcept C66825105 @default.
- W2616831687 hasConceptScore W2616831687C120665830 @default.
- W2616831687 hasConceptScore W2616831687C121332964 @default.
- W2616831687 hasConceptScore W2616831687C160671074 @default.
- W2616831687 hasConceptScore W2616831687C171250308 @default.
- W2616831687 hasConceptScore W2616831687C177562468 @default.
- W2616831687 hasConceptScore W2616831687C192562407 @default.
- W2616831687 hasConceptScore W2616831687C2779227376 @default.
- W2616831687 hasConceptScore W2616831687C49040817 @default.
- W2616831687 hasConceptScore W2616831687C66825105 @default.
- W2616831687 hasLocation W26168316871 @default.
- W2616831687 hasLocation W26168316872 @default.
- W2616831687 hasLocation W26168316873 @default.
- W2616831687 hasLocation W26168316874 @default.
- W2616831687 hasOpenAccess W2616831687 @default.
- W2616831687 hasPrimaryLocation W26168316871 @default.
- W2616831687 hasRelatedWork W2058676402 @default.
- W2616831687 hasRelatedWork W2071620215 @default.
- W2616831687 hasRelatedWork W2333924688 @default.
- W2616831687 hasRelatedWork W2413111168 @default.
- W2616831687 hasRelatedWork W2417094738 @default.
- W2616831687 hasRelatedWork W2516385279 @default.
- W2616831687 hasRelatedWork W2902546961 @default.
- W2616831687 hasRelatedWork W2983969511 @default.
- W2616831687 hasRelatedWork W3139098615 @default.
- W2616831687 hasRelatedWork W4308136370 @default.
- W2616831687 hasVolume "109" @default.
- W2616831687 isParatext "false" @default.
- W2616831687 isRetracted "false" @default.
- W2616831687 magId "2616831687" @default.
- W2616831687 workType "article" @default.