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- W2617454985 abstract "In this paper we obtain a linear model from the frequency response of a piezoelectric scanner which is widely employed in scanning probe microscopy. A model quality evaluation method based on robust identification techniques is used to choose the best low order model. It is seen that the obtained model accurately predicts the behavior of the piezoelectric scanner in the desired range of deformations." @default.
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- W2617454985 date "1997-06-01" @default.
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- W2617454985 title "Robust Identification and Control of Scanning Probe Microscope Scanner" @default.
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- W2617454985 doi "https://doi.org/10.1016/s1474-6670(17)42577-8" @default.
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