Matches in SemOpenAlex for { <https://semopenalex.org/work/W2617559639> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W2617559639 abstract "Hybrid PVD-PECVD process of titanium magnetron sputtering in argon and acetylene atmosphere combines aspects of both conventional techniques: sputtering of titanium target (PVD) and acetylene as a source of carbon for polymerization (PECVD). It has been used for deposition of nanocomposite material consisting of nanocrystallites of titanium carbide embedded in hydrogenated carbon matrix (nc-TiC/a-C:H) which is an industrially attractive material for protective coatings. The aim of this contribution is to describe and understand elementary processes influencing the deposition process. Evolution of discharge voltage and current, pressure and selected spectral line intensities as a function of acetylene supply flow is reported." @default.
- W2617559639 created "2017-06-05" @default.
- W2617559639 creator A5066118474 @default.
- W2617559639 creator A5074531453 @default.
- W2617559639 creator A5086098450 @default.
- W2617559639 date "2011-01-01" @default.
- W2617559639 modified "2023-09-27" @default.
- W2617559639 title "Understanding of hybrid PVD-PECVD deposition process – titanium magnetron sputtering in argon and acetylene" @default.
- W2617559639 hasPublicationYear "2011" @default.
- W2617559639 type Work @default.
- W2617559639 sameAs 2617559639 @default.
- W2617559639 citedByCount "0" @default.
- W2617559639 crossrefType "journal-article" @default.
- W2617559639 hasAuthorship W2617559639A5066118474 @default.
- W2617559639 hasAuthorship W2617559639A5074531453 @default.
- W2617559639 hasAuthorship W2617559639A5086098450 @default.
- W2617559639 hasConcept C123408415 @default.
- W2617559639 hasConcept C151730666 @default.
- W2617559639 hasConcept C159985019 @default.
- W2617559639 hasConcept C171250308 @default.
- W2617559639 hasConcept C178790620 @default.
- W2617559639 hasConcept C185592680 @default.
- W2617559639 hasConcept C19067145 @default.
- W2617559639 hasConcept C191897082 @default.
- W2617559639 hasConcept C192562407 @default.
- W2617559639 hasConcept C22423302 @default.
- W2617559639 hasConcept C2777121994 @default.
- W2617559639 hasConcept C2777517455 @default.
- W2617559639 hasConcept C2816523 @default.
- W2617559639 hasConcept C38347018 @default.
- W2617559639 hasConcept C506065880 @default.
- W2617559639 hasConcept C51576277 @default.
- W2617559639 hasConcept C547737533 @default.
- W2617559639 hasConcept C57410435 @default.
- W2617559639 hasConcept C61427134 @default.
- W2617559639 hasConcept C64297162 @default.
- W2617559639 hasConcept C86803240 @default.
- W2617559639 hasConceptScore W2617559639C123408415 @default.
- W2617559639 hasConceptScore W2617559639C151730666 @default.
- W2617559639 hasConceptScore W2617559639C159985019 @default.
- W2617559639 hasConceptScore W2617559639C171250308 @default.
- W2617559639 hasConceptScore W2617559639C178790620 @default.
- W2617559639 hasConceptScore W2617559639C185592680 @default.
- W2617559639 hasConceptScore W2617559639C19067145 @default.
- W2617559639 hasConceptScore W2617559639C191897082 @default.
- W2617559639 hasConceptScore W2617559639C192562407 @default.
- W2617559639 hasConceptScore W2617559639C22423302 @default.
- W2617559639 hasConceptScore W2617559639C2777121994 @default.
- W2617559639 hasConceptScore W2617559639C2777517455 @default.
- W2617559639 hasConceptScore W2617559639C2816523 @default.
- W2617559639 hasConceptScore W2617559639C38347018 @default.
- W2617559639 hasConceptScore W2617559639C506065880 @default.
- W2617559639 hasConceptScore W2617559639C51576277 @default.
- W2617559639 hasConceptScore W2617559639C547737533 @default.
- W2617559639 hasConceptScore W2617559639C57410435 @default.
- W2617559639 hasConceptScore W2617559639C61427134 @default.
- W2617559639 hasConceptScore W2617559639C64297162 @default.
- W2617559639 hasConceptScore W2617559639C86803240 @default.
- W2617559639 hasLocation W26175596391 @default.
- W2617559639 hasOpenAccess W2617559639 @default.
- W2617559639 hasPrimaryLocation W26175596391 @default.
- W2617559639 hasRelatedWork W1987096307 @default.
- W2617559639 hasRelatedWork W1992342910 @default.
- W2617559639 hasRelatedWork W1992525485 @default.
- W2617559639 hasRelatedWork W1998291600 @default.
- W2617559639 hasRelatedWork W2001875781 @default.
- W2617559639 hasRelatedWork W2002139908 @default.
- W2617559639 hasRelatedWork W2035160303 @default.
- W2617559639 hasRelatedWork W2070849244 @default.
- W2617559639 hasRelatedWork W2272010262 @default.
- W2617559639 hasRelatedWork W2495423565 @default.
- W2617559639 hasRelatedWork W2592518609 @default.
- W2617559639 hasRelatedWork W2602911761 @default.
- W2617559639 hasRelatedWork W2605541576 @default.
- W2617559639 hasRelatedWork W2736289016 @default.
- W2617559639 hasRelatedWork W2738065069 @default.
- W2617559639 hasRelatedWork W370333247 @default.
- W2617559639 hasRelatedWork W625498403 @default.
- W2617559639 hasRelatedWork W2086008667 @default.
- W2617559639 hasRelatedWork W2626529761 @default.
- W2617559639 hasRelatedWork W2828095091 @default.
- W2617559639 isParatext "false" @default.
- W2617559639 isRetracted "false" @default.
- W2617559639 magId "2617559639" @default.
- W2617559639 workType "article" @default.