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• W2620007132 endingPage "123" @default.
• W2620007132 startingPage "118" @default.
• W2620007132 abstract "H implantation in Si/Si:B/Si structures is a promising route to improve the Smart Cut™ process and transfer thin Si layers of reduced roughness and controlled thickness onto regular Si wafers. However, the mechanisms driving this process are unknown and thus difficult to model or optimize. For this reason, we have experimentally studied the redistribution of H which takes place in such structures after implantation and during annealing using SIMS and TEM. We show that the Si:B layer already traps H during implantation and form platelets parallel to the wafer surface. During annealing, the H atoms implanted in the Si regions are slowly transferred toward the Si:B layer where they are trapped on large platelets which grow further during annealing. Routes to optimize this process go through the minimization of H precipitation in the pure Si regions. This can probably be achieved by optimizing the implantation conditions." @default.
• W2620007132 created "2017-06-05" @default.
• W2620007132 creator A5003237967 @default.
• W2620007132 creator A5024168567 @default.
• W2620007132 creator A5033037834 @default.
• W2620007132 creator A5067238666 @default.
• W2620007132 creator A5082147444 @default.
• W2620007132 date "2017-08-01" @default.
• W2620007132 modified "2023-10-14" @default.
• W2620007132 title "Diffusion and trapping of implanted hydrogen in a Si/Si:B/Si structure" @default.
• W2620007132 cites W1203190902 @default.
• W2620007132 cites W1630123365 @default.
• W2620007132 cites W1963666289 @default.
• W2620007132 cites W1964362317 @default.
• W2620007132 cites W1972615176 @default.
• W2620007132 cites W1973216004 @default.
• W2620007132 cites W1973671776 @default.
• W2620007132 cites W1975917601 @default.
• W2620007132 cites W1996143157 @default.
• W2620007132 cites W2017013006 @default.
• W2620007132 cites W2025240731 @default.
• W2620007132 cites W2040220536 @default.
• W2620007132 cites W2058657773 @default.
• W2620007132 cites W2060796267 @default.
• W2620007132 cites W2070678844 @default.
• W2620007132 cites W2088511608 @default.
• W2620007132 cites W2090005546 @default.
• W2620007132 cites W2210742194 @default.
• W2620007132 cites W2253746049 @default.
• W2620007132 cites W2533319550 @default.
• W2620007132 cites W3141241093 @default.
• W2620007132 doi "https://doi.org/10.1016/j.mssp.2017.05.025" @default.
• W2620007132 hasPublicationYear "2017" @default.
• W2620007132 type Work @default.
• W2620007132 sameAs 2620007132 @default.
• W2620007132 citedByCount "1" @default.
• W2620007132 countsByYear W26200071322018 @default.
• W2620007132 crossrefType "journal-article" @default.
• W2620007132 hasAuthorship W2620007132A5003237967 @default.
• W2620007132 hasAuthorship W2620007132A5024168567 @default.
• W2620007132 hasAuthorship W2620007132A5033037834 @default.
• W2620007132 hasAuthorship W2620007132A5067238666 @default.
• W2620007132 hasAuthorship W2620007132A5082147444 @default.
• W2620007132 hasConcept C121332964 @default.
• W2620007132 hasConcept C127413603 @default.
• W2620007132 hasConcept C145148216 @default.
• W2620007132 hasConcept C159985019 @default.
• W2620007132 hasConcept C160671074 @default.
• W2620007132 hasConcept C17744445 @default.
• W2620007132 hasConcept C178790620 @default.
• W2620007132 hasConcept C185592680 @default.
• W2620007132 hasConcept C18903297 @default.
• W2620007132 hasConcept C192562407 @default.
• W2620007132 hasConcept C199539241 @default.
• W2620007132 hasConcept C2777855556 @default.
• W2620007132 hasConcept C2777924906 @default.
• W2620007132 hasConcept C41823505 @default.
• W2620007132 hasConcept C42360764 @default.
• W2620007132 hasConcept C49040817 @default.
• W2620007132 hasConcept C512968161 @default.
• W2620007132 hasConcept C544956773 @default.
• W2620007132 hasConcept C62520636 @default.
• W2620007132 hasConcept C74080474 @default.
• W2620007132 hasConcept C8010536 @default.
• W2620007132 hasConcept C86803240 @default.
• W2620007132 hasConcept C94625758 @default.
• W2620007132 hasConceptScore W2620007132C121332964 @default.
• W2620007132 hasConceptScore W2620007132C127413603 @default.
• W2620007132 hasConceptScore W2620007132C145148216 @default.
• W2620007132 hasConceptScore W2620007132C159985019 @default.
• W2620007132 hasConceptScore W2620007132C160671074 @default.
• W2620007132 hasConceptScore W2620007132C17744445 @default.
• W2620007132 hasConceptScore W2620007132C178790620 @default.
• W2620007132 hasConceptScore W2620007132C185592680 @default.
• W2620007132 hasConceptScore W2620007132C18903297 @default.
• W2620007132 hasConceptScore W2620007132C192562407 @default.
• W2620007132 hasConceptScore W2620007132C199539241 @default.
• W2620007132 hasConceptScore W2620007132C2777855556 @default.
• W2620007132 hasConceptScore W2620007132C2777924906 @default.
• W2620007132 hasConceptScore W2620007132C41823505 @default.
• W2620007132 hasConceptScore W2620007132C42360764 @default.
• W2620007132 hasConceptScore W2620007132C49040817 @default.
• W2620007132 hasConceptScore W2620007132C512968161 @default.
• W2620007132 hasConceptScore W2620007132C544956773 @default.
• W2620007132 hasConceptScore W2620007132C62520636 @default.
• W2620007132 hasConceptScore W2620007132C74080474 @default.
• W2620007132 hasConceptScore W2620007132C8010536 @default.
• W2620007132 hasConceptScore W2620007132C86803240 @default.
• W2620007132 hasConceptScore W2620007132C94625758 @default.
• W2620007132 hasLocation W26200071321 @default.
• W2620007132 hasLocation W26200071322 @default.
• W2620007132 hasLocation W26200071323 @default.
• W2620007132 hasOpenAccess W2620007132 @default.
• W2620007132 hasPrimaryLocation W26200071321 @default.
• W2620007132 hasRelatedWork W1942908206 @default.
• W2620007132 hasRelatedWork W1990068680 @default.
• W2620007132 hasRelatedWork W1998662473 @default.
• W2620007132 hasRelatedWork W2024762920 @default.

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