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- W2621308359 abstract "In this paper, we report on the characterization of Si thin films doped by wet-chemical laser processing. Using this method, implantation and dopant activation can be performed simultaneously. After laser doping, the mobility, carrier concentration, and resistivity of the films were 74 cm2/V·s, 5.5 × 1017 cm−3, and 0.15 Ω·cm, respectively." @default.
- W2621308359 created "2017-06-09" @default.
- W2621308359 creator A5050118923 @default.
- W2621308359 creator A5065627883 @default.
- W2621308359 creator A5071209767 @default.
- W2621308359 creator A5081429604 @default.
- W2621308359 creator A5086059697 @default.
- W2621308359 date "2017-05-01" @default.
- W2621308359 modified "2023-09-27" @default.
- W2621308359 title "30-4: Characterization of Si Thin Films Doped by Wet-Chemical Laser Processing" @default.
- W2621308359 cites W1972553019 @default.
- W2621308359 cites W2003980178 @default.
- W2621308359 cites W2032757709 @default.
- W2621308359 cites W2053006767 @default.
- W2621308359 cites W2080240036 @default.
- W2621308359 cites W2124983814 @default.
- W2621308359 cites W2147608307 @default.
- W2621308359 doi "https://doi.org/10.1002/sdtp.11659" @default.
- W2621308359 hasPublicationYear "2017" @default.
- W2621308359 type Work @default.
- W2621308359 sameAs 2621308359 @default.
- W2621308359 citedByCount "2" @default.
- W2621308359 countsByYear W26213083592019 @default.
- W2621308359 countsByYear W26213083592020 @default.
- W2621308359 crossrefType "journal-article" @default.
- W2621308359 hasAuthorship W2621308359A5050118923 @default.
- W2621308359 hasAuthorship W2621308359A5065627883 @default.
- W2621308359 hasAuthorship W2621308359A5071209767 @default.
- W2621308359 hasAuthorship W2621308359A5081429604 @default.
- W2621308359 hasAuthorship W2621308359A5086059697 @default.
- W2621308359 hasConcept C113196181 @default.
- W2621308359 hasConcept C119599485 @default.
- W2621308359 hasConcept C120665830 @default.
- W2621308359 hasConcept C121332964 @default.
- W2621308359 hasConcept C127413603 @default.
- W2621308359 hasConcept C171250308 @default.
- W2621308359 hasConcept C185592680 @default.
- W2621308359 hasConcept C19067145 @default.
- W2621308359 hasConcept C191952053 @default.
- W2621308359 hasConcept C192562407 @default.
- W2621308359 hasConcept C2780081452 @default.
- W2621308359 hasConcept C2780841128 @default.
- W2621308359 hasConcept C43617362 @default.
- W2621308359 hasConcept C49040817 @default.
- W2621308359 hasConcept C520434653 @default.
- W2621308359 hasConcept C57863236 @default.
- W2621308359 hasConcept C69990965 @default.
- W2621308359 hasConceptScore W2621308359C113196181 @default.
- W2621308359 hasConceptScore W2621308359C119599485 @default.
- W2621308359 hasConceptScore W2621308359C120665830 @default.
- W2621308359 hasConceptScore W2621308359C121332964 @default.
- W2621308359 hasConceptScore W2621308359C127413603 @default.
- W2621308359 hasConceptScore W2621308359C171250308 @default.
- W2621308359 hasConceptScore W2621308359C185592680 @default.
- W2621308359 hasConceptScore W2621308359C19067145 @default.
- W2621308359 hasConceptScore W2621308359C191952053 @default.
- W2621308359 hasConceptScore W2621308359C192562407 @default.
- W2621308359 hasConceptScore W2621308359C2780081452 @default.
- W2621308359 hasConceptScore W2621308359C2780841128 @default.
- W2621308359 hasConceptScore W2621308359C43617362 @default.
- W2621308359 hasConceptScore W2621308359C49040817 @default.
- W2621308359 hasConceptScore W2621308359C520434653 @default.
- W2621308359 hasConceptScore W2621308359C57863236 @default.
- W2621308359 hasConceptScore W2621308359C69990965 @default.
- W2621308359 hasLocation W26213083591 @default.
- W2621308359 hasOpenAccess W2621308359 @default.
- W2621308359 hasPrimaryLocation W26213083591 @default.
- W2621308359 hasRelatedWork W1840049028 @default.
- W2621308359 hasRelatedWork W1977894076 @default.
- W2621308359 hasRelatedWork W1982106247 @default.
- W2621308359 hasRelatedWork W2003715269 @default.
- W2621308359 hasRelatedWork W2012102424 @default.
- W2621308359 hasRelatedWork W2022501680 @default.
- W2621308359 hasRelatedWork W2024704172 @default.
- W2621308359 hasRelatedWork W2030861075 @default.
- W2621308359 hasRelatedWork W2049279148 @default.
- W2621308359 hasRelatedWork W2055422823 @default.
- W2621308359 hasRelatedWork W2059328221 @default.
- W2621308359 hasRelatedWork W2069623920 @default.
- W2621308359 hasRelatedWork W2074278276 @default.
- W2621308359 hasRelatedWork W2397009851 @default.
- W2621308359 hasRelatedWork W2613128064 @default.
- W2621308359 hasRelatedWork W2623332764 @default.
- W2621308359 hasRelatedWork W2758477424 @default.
- W2621308359 hasRelatedWork W2887317794 @default.
- W2621308359 hasRelatedWork W3151984540 @default.
- W2621308359 hasRelatedWork W564688528 @default.
- W2621308359 isParatext "false" @default.
- W2621308359 isRetracted "false" @default.
- W2621308359 magId "2621308359" @default.
- W2621308359 workType "article" @default.