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- W2626026412 abstract "In order to examine the size effect of a stress concentration region on fracture strength at the nanometer scale, fracture experiments were carried using silicon single crystal cantilever specimens with a notch. A crack was initiated along the (110) cleavage plane from the notch root. Finite element analyses pointed out that the fracture strength, which was evaluated by the normal stress at 1 nm from the notch root, gradually increased with decrease of the stress concentration region size and reached the ideal strength of the (110) cleavage plane of silicon." @default.
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- W2626026412 date "2016-01-01" @default.
- W2626026412 modified "2023-09-25" @default.
- W2626026412 title "Fracture criterion of single crystal silicon with stress concentration region in nanometer scale" @default.
- W2626026412 doi "https://doi.org/10.1299/jsmemm.2016.os11-24" @default.
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