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- W2626202948 abstract "CNx (carbon nitride) coating is an attractive material due to low friction coefficient. However, our previous research reported that the wear resistance of CNx deposited by IBA-ED (Ion Beam Assisted－Electron beam Deposition) was insufficient. In order to overcome this problem, we deposited CNx with higher hardness and non-droplet using IBA-FAD (Ion Beam Assisted－Filtered Arc Deposition), and this film showed high wear resistance. We termed the new CNx as ta-CNx (tetrahedral amorphous－Carbon Nitride). More interestingly, ta-CNx showed higher wear resistance with higher N/C ratio regardless of hardness decreasing. Here we show the mechanical and the fictional properties of ta-CNx." @default.
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- W2626202948 date "2016-01-01" @default.
- W2626202948 modified "2023-09-25" @default.
- W2626202948 title "Development of high wear resistance ta-CNx and examination of the mechanism" @default.
- W2626202948 doi "https://doi.org/10.1299/jsmemdt.2016.16.a1-1" @default.
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